一种软X射线荧光吸收谱探测器  

A Soft X-ray Fluorescence Absorption Spectrometer

作　　者：李顺 赵彬豪 刘晨 王嘉鸥[1] 钱海杰[1] LI Shun;ZHAO Bin-hao;LIU Chen;WANG Jia-ou;QIAN Hai-jie(Institute of High Energy Physics,Chinese Academy of Sciences,Beijing100049,China;School of Physical Sciences,University of Chinese Academy of Sciences,Beijing100049,China;School of Physics and Technology,Xinjiang University,Urumqi 830046,China)

机构地区：[1]中国科学院高能物理研究所,北京100049 [2]中国科学院大学物理科学学院,北京100049 [3]新疆大学物理科学与技术学院,乌鲁木齐830046

出　　处：《光子学报》2019年第6期173-179,共7页Acta Photonica Sinica

基　　金：国家自然科学基金面上项目(No.11575227);国家自然科学基金(No.U1632108)~~

摘　　要：以微通道板为光电转换元件,以光子计数法为读出方式设计制作了一种实用的荧光强度探测器,结合北京同步辐射装置4B9B光电子能谱实验站特点,在样品架加载正偏压的方法减少杂散电子对荧光探测信号的影响,有效提高了荧光探测器的信噪比.搭建的软X射线全荧光产额吸收谱探测器有独立的真空系统,可方便与实验站分析腔体对接,也可将探测器安装于其他束线,具备良好的移植性和便捷性.利用该探测设备成功获取了表面覆盖ZnS薄膜材料的SrTiO3晶体TiL边特征吸收谱,与全电子产额模式模式吸收谱相比显示出探测设备对绝缘样品和深层次体相探测的优势.该探测器已在北京同步辐射4B9B光电子能谱实验站使用,拓展了实验站软X射线吸收谱的功能,在表面催化,电极材料,薄膜衬底的研究中,为实验用户增加了一个新的表征手段.A microchannel plate is used as a photoelectric conversion component,and a photon counting method is used as a readout method to design a practical fluorescence intensity detector.Combined with the characteristics of the 4B9B photoelectron spectroscopy experimental station of Beijing Synchrotron Radiation Facility (BSRF),a soft X-ray total fluorescence yield absorption spectrum detection system was developed.This detector is equipped with an independent vacuum system to facilitate docking and disassembly of the vacuum chamber of the experimental station,so that the equipment has good portability and convenience.The Ti L-edge absorption spectrum of SrTiO 3 crystals with surface-coated ZnS thin films is successfully obtained by using this detection device.Compared with the total electron yield mode absorption spectra,the advantages of the detection equipment for the insulation samples and deep phase detection are demonstrated.The detector has being used in 4B9B photoelectron spectroscopy experimental station,BSRF,which extends the function of soft x-ray absorption spectrum in the study of surface catalysis,electrode materials and thin film substrates and provides a new representation method for the experimental users.

关 键 词：软X射线 荧光产额 吸收谱 同步辐射 微通道板 

分 类 号：N33[自然科学总论] N39