基于飞秒激光加工的无膜光纤气体压力传感器  

Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining

作　　者：姜源 江毅[1] 张柳超 王素梅[2] Jiang Yuan;Jiang Yi;Zhang Liuchao;Wang Sumei(School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China;Laser Micro/Nano Fabrication Laboratory, Beijing Institute of Technology, Beijing 100081, China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]北京理工大学激光微纳制造研究所,北京100081

出　　处：《激光与光电子学进展》2019年第10期49-53,共5页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61575021,61775020)

摘　　要：设计了一种基于飞秒激光加工的无膜式光纤气体压力传感器。通过熔接形成了单模光纤-空心光纤-无芯光纤(NCF)结构,熔接结构中的两个熔接面作为反射面,构成一个低精细度的外腔式法布里-珀罗干涉仪(EFPI)。利用飞秒激光加工结构中的空心光纤部分,烧蚀出一个与外界环境连通的小孔。外界气体压力的变化引起EFPI腔中气体折射率发生变化,通过测量法布里-珀罗腔的光学腔长,得到对应的外界气体压力。实验结果表明,传感器在0~5MPa压力范围内的腔长-压力灵敏度为1.02μm/MPa,传感器的压力分辨率为2.4kPa。该压力传感器具有量程大、灵敏度高、分辨率高和线性度高等优点。A non-diaphragm fiber gas pressure sensor fabricated using a femtosecond laser is proposed and experimentally demonstrated. This sensor is a type of low-precision extrinsic Fabry-Perot interferometer (EFPI) formed by sandwiching a hollow fiber (HF) between a single mode fiber and a no-core fiber. A femtosecond laser is used to drill a micro-channel on the side wall of the HF to allow the gas to enter and exit the HF. When the external gas pressure changes, the refractive index of the gas in the EFPI cavity changes. The gas pressure can be detected by determining the optical cavity length of the EFPI. The experimental results show that the pressure sensitivity in the cavity is 1.02 μm/MPa in the pressure range of 0-5 MPa, and the pressure resolution of the sensor is 2.4 kPa. This pressure sensor has the advantages such as wide measuring range, high sensitivity, high resolution, and high linearity.

关 键 词：光纤光学 压力传感器 外腔式法布里-珀罗干涉仪 飞秒激光加工 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]