脉冲辅助大气压射频辉光放电数值模拟  

Numerical Simulation of Atmospheric Radio Frequency Glow Discharges Assisted by Pulsed Discharge

作　　者：宫云舒 郭颖[1] 邱慎杰 张菁[1] 石建军[1] GONG Yunshu;GUO Ying;QIU Shenjie;ZHANG Jing;SHI Jianjun(College of Science,Donghua University, Shanghai201620, China)

机构地区：[1]东华大学理学院

出　　处：《东华大学学报（自然科学版）》2019年第3期471-476,共6页Journal of Donghua University(Natural Science)

基　　金：国家自然科学基金资助项目(11475043,11375042)

摘　　要：建立一维自洽流体数值模型,研究大气压氦气条件下,脉冲辅助射频放电时,脉冲放电对射频起辉及稳态放电特性的影响,着重讨论脉冲放电及射频放电电压保持不变时,脉冲放电和射频放电段之间的时间间隔变化对射频放电特性的影响。结果表明:脉冲放电对射频放电的辅助效果主要体现在射频放电段的起辉阶段;随着时间间隔的增长,射频放电起辉阶段电子密度在射频放电空间中的最大值明显降低,鞘层区增大;平均电子能量和电场强度的空间分布特性揭示了放电随时间间隔变化的动力学过程。A one-dimensional self-consistent numerical fluid model was developed for the radio frequency atmosphere pressure glow discharge assisted by pulsed discharge in helium. The effect of pulsed discharge on the discharge characteristics of radio frequency discharge was studied. By changing the time interval between pulsed discharge and radio frequency discharge and keeping the amplitudes of pulse voltage and radio frequency voltage, the discharge characteristics of radio frequency discharge was discussed. ResulTSshow that the assistant effect of pulsed discharge is mainly reflected in the ignition of radio frequency discharge. With the increase of time interval, the electron density reduces significantly in the radio frequency discharge, and the thickness of sheath increases during the ignition phase of radio frequency discharge. The spatial distribution characteristics of the mean electron energy and electrical field intensity reveal the dynamics process of discharge with the change of time interval.

关 键 词：射频辉光放电 数值模拟 脉冲放电 

分 类 号：O531[理学—等离子体物理]