矩形波导转微波谐振腔同轴天线的仿真设计  

Design and Simulation of Rectangular Waveguide to Microwave Resonant Coaxial Antennas

作　　者：闫新胜 赵连敏 刘甫坤 吴大俊 贾华 单家芳 YAN Xin-sheng;ZHAO Lian-min;LIU Fu-kun;WU Da-jun;JIA Hua;SHAN Jia-fang(Institute of Plasma Physics,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学院等离子体物理研究所,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026

出　　处：《真空电子技术》2019年第3期55-58,共4页Vacuum Electronics

摘　　要：矩形波导转谐振腔同轴天线是微波等离子体镀膜系统的重要组件之一。借助仿真模拟软件,以中心频率915MHz仿真设计了两种矩形波导同轴天线转换器。其一是垂直结构,同轴天线与矩形波导垂直相交;其二是相切弧结构,同轴天线内导体以相切的弧线向矩形波导过渡。仿真分析了两种结构的适用范围。分析表明,加销钉的垂直结构在100MHz带宽范围内,反射系数小于-10dB,同轴内导体的直径需不大于波导宽度的1/10;优化后的相切弧结构在100MHz带宽范围内,反射系数小于-10dB,同轴内导体直径需不小于波导宽度的1/4。The rectangular waveguide to resonant cavity coaxial antenna is an important component of the microwave plasma coating system.Two kinds of rectangular waveguide to coaxial antenna converters with the center frequency of 915 MHz were designed and simulated.The first is a vertical structure,the coaxial antenna intersects perpendicularly with the rectangular waveguide;while the second is a tangent arc structure,the inner conductor of the coaxial antenna transitions to the rectangular waveguide with a tangent arc.The application scope of the two structures was simulated and analyzed.The analysis shows that the reflection coefficient of the vertical structure with the pin is less than-10 dB within 100 MHz bandwidth when the diameter of the coaxial inner conductor is not greater than one tenth of the waveguide width,meanwhile the reflection coefficient of the optimized tangent arc structure is less than-10 dB within 100 MHz bandwidth when the coaxial inner conductor diameter is not less than a quarter of the waveguide width.

关 键 词：波导转换 HFSS仿真模拟 反射系数 

分 类 号：TN812[电子电信—信息与通信工程]