红外激光与微水束耦合对准工艺研究  

Study on coupling alignment technology between infrared laser and microbeam

作　　者：蒋兴桥[1] 马岩[1] 荣宇[1] 李东旭[1] JIANG Xing-qiao;MA Yan;RONG Yu;LI Dong-xu(Shenyang Academy of Instrumentation Science Co.,Ltd.,Shenyang 110043,China)

机构地区：[1]沈阳仪表科学研究院有限公司

出　　处：《激光与红外》2019年第6期680-685,共6页Laser & Infrared

基　　金：辽宁省科技创新重大专项(No.201411004)资助

摘　　要：红外激光与微水束耦合划切技术是激光划切应用的前沿领域,在硅晶圆、宝石、陶瓷等材料高精度切割方面具有优势,有效地减小了材料的热损伤和熔渣残留。红外激光束与微水束的耦合对准是研究的关键技术。为保证微水束光纤与激光光束耦合的效果,本文设计了高精度三维耦合对准调整结构,结构主要由准直聚焦光路系统、微孔CCD观测系统、二维微位移平台、耦合装置组成;研究了汇聚激光焦平面与微水束起始端(喷口元件)共面调整的关键工艺和激光光束与喷口元件对准的关键工艺;提出了借助屏幕十字线实现两次对准的工艺方法。经试验验证,微水束耦合激光长度稳定,质量良好,可实现对硅基衬底晶圆等材料的高效无损、高精密划切。Water-jet guided laser processing technology is the frontier of laser cutting application.It has advantages in the high-precision cutting of silicon wafer,gemstone,ceramic and other materials,and effectively reduces the thermal damage and slag residue of materials.The coupling alignment of infrared laser beam and microwater beam is the key technology.In order to ensure the coupling effect of microbeam fiber and laser beam,a high-precision three-dimensional coupling alignment adjustment mechanism is designed in the paper,which mainly consists of a quasi-straight focus light path system,a microhole CCD observation system,a two-dimensional microdisplacement platform,and a coupling device.The key technology of coplanar adjustment of laser focal plane and microbeam starting end(nozzle element) and alignment of laser beam and nozzle element are studied.The technology method of realizing two alignment by screen crossover is put forward in the paper.The experiments show that the microbeam coupling laser has stable length and good quality,and can achieve high efficiency and high precision cutting of silicon substrate wafers and other materials.

关 键 词：激光 微水束 耦合 对准 

分 类 号：TN249[电子电信—物理电子学]