大气压Ar/NH3/H2O等离子体射流放电特性  

Discharge Characteristics of Ar/NH3/H2O Plasma Jet Under Atmospheric Pressure

作　　者：易善婷 刘峰 方志 YI Shanting;LIU Feng;FANG Zhi(College of Electrical Engineering and Control Science,Nanjing Tech University,Nanjing 210009,China)

机构地区：[1]南京工业大学电气工程与控制科学学院

出　　处：《高电压技术》2019年第6期1936-1944,共9页High Voltage Engineering

基　　金：国家自然科学基金(51377075;51777091);江苏省重点研发计划(产业前瞻与共性关键技术)(BE2017023)~~

摘　　要：为提高等离子体射流在材料表面处理、环境保护及消毒灭菌等领域中的应用效果,通过在大气压Ar等离子体射流中添加适量NH3/H2O气体,增强等离子体射流活性。利用发射光谱诊断和发光图像拍摄,研究Ar/NH3/H2O等离子体射流NH、OH、O等强氧化性粒子发射光谱强度及射流长度随外加电压和添加气体含量的变化规律,测量相应条件下电压电流波形和Lissajous图形,并对实验结果做机理分析与讨论。研究结果表明,Ar/NH3/H2O等离子体射流主要产生Ar、N2、NH、OH和O等粒子。随外加电压增大,NH、OH和O等粒子谱线强度、射流长度、放电功率和传输电荷均随之增大。当NH3在Ar/NH3气体体系中体积分数达到0.012 5%时,NH自由基发射光谱强度达到最大。在此条件下添加H2O,发现当H2O体积分数达到0.25%时,OH和O粒子谱线强度达到最大,比Ar/NH3放电时OH和O粒子谱线强度分别增加了104.4%和55.8%,而NH粒子谱线强度则下降了18.7%,此时等离子体射流中氧化性粒子(NH、OH和O)总发射光谱强度达到最大,更有利于在材料亲水改性和消毒灭菌等方面应用。To enhance the treatment effects of the atmospheric pressure plasma jet(APPJ)in the fields of material surface treatment,environmental protection,and disinfection sterilization,etc.,NH3/H2O were added to the Ar APPJ to improve the activity of the APPJ.The optical emission spectral intensities of NH,OH and O and the length of the plasma plume were investigated at various applied voltages and NH3/H2O ratios by optical emission spectra diagnosis and light-emission images observation.The voltage-current waveforms and Lissajous figures were also recorded correspondingly.Results showed that the main species produced by APPJ in Ar/NH3/H2O included Ar,N2,NH,OH,and O.As the applied voltage increased,the emission spectral intensities of NH,OH and O,the length of the plasma plume,discharge power and transported charges all increased.When the added NH3 reached 0.012 5%in the Ar/NH3 mixed gas,the emission spectral intensity of NH reached the maximum.,When H2O was added under this condition,it was found that the emission spectral intensities of OH and O reached the maximum values when the water vapor content was 0.25%and the emission spectral intensities of OH and O increased by 104.4%and 55.8%as compared with those of APPJ in Ar/NH3,while the emission spectral intensity of NH decreased by 18.7%.The overall emission spectral intensities of the oxidizing particles(NH,OH and O)in Ar APPJ reached the maximum,and it should be more favorable for applications in materials hydrophilic modification and disinfection sterilization,etc.

关 键 词：大气压等离子体射流 低温等离子体 放电特性 发射光谱 活性粒子 谱线强度 

分 类 号：O53[理学—等离子体物理]