基于等离子法PDMS基体与玻璃键合效果分析  

Analysis of Bonding Effect of PDMS Substrate and Glass Based on Plasma Method

作　　者：严银 李梦一 戴隆超[1] YAN Yin;LI Meng-yi;DAI Long-chao(Yangzhou University,School of Mechanical Engineering,Yangzhou 225127,China)

机构地区：[1]扬州大学机械工程学院

出　　处：《高分子通报》2019年第6期45-50,共6页Polymer Bulletin

摘　　要：采用等离子法对聚二甲基硅氧烷(PDMS)基体和玻璃进行表面处理.根据所设计的正交实验和对比实验进行键合,探究键合的最优工艺参数组合、键合面积与键合时间的关系以及PDMS基体放置时间与键合面积的关系。实验结果表明:影响PDMS基体-玻璃键合面积因素从主到次为空气流量〉清洗时间〉射频功率.正交实验所得最优方案参数组合为250W、2L/min、1min;最佳键合时间为12h.在此时间内.键合时间越长.键合效果越好;PI)MS基体经过表面处理后,放置时间越长键合面积越小,为保证键合质量,键合实验通常在表面处理后1Omin内进行。Using plasma method to treat the polydimethylsiloxane (PDMS) substrates and glass' s surface, exploring the optimal process parameter combination of polydimethylsiloxane ( PDMS) matrix and glass bonding, the relationship between bonding effect and bonding time, and the relationship between PDMS substrate placement time and bonding area. The test results showed that the influencing factors were oxygen flowcleaning time> radio frequency from primary to secondary. The optimal parameter combination of test scheme was 25OW, 2L/min, lmin;the most suitable bonding time was 12h, during this time the longer the bonding time, the better the bonding effect;the longer the PDMS substrate was placed the worse the bonding effect was. To ensure the bonding quality, bonding test was usually performed within 10 minutes after the surface treatment.

关 键 词：聚二甲基硅氧烷 等离子法 正交实验 键合面积 键合效果 

分 类 号：TB306[一般工业技术—材料科学与工程]