亚真空环境中在线气体检测系统  

Online Gas Detection System in Sub-vacuum Environment

作　　者：金策[1] 刘涛[2] JIN Ce;LIU Tao(Nuclear Industry Institute of Physics and Engineering,Tianjin 300180,China;Nuclear Industry Instituteof Physicsand Engineering,National Science Key Lab ofParticle Transport and Enrichment Technology,Tianjin 300180,China)

机构地区：[1]核工业理化工程研究院,中国天津300180 [2]核工业理化工程研究院,粒子输运与富集技术国防科技重点实验室,中国天津300180

出　　处：《科技视界》2019年第15期86-88,共3页Science & Technology Vision

摘　　要：本文针对现有实验中需要测量亚真空系统的气体成分的需求,根据残余气体分析仪的工作状态,设计了亚真空在线气体检测系统,通过模拟仿真细化完善设计,确定了系统的减压结构的参数,同时通过实验验证了亚真空环境在线气体检测系统系可以在几百至上千帕的环境中,长时间有效地对相应腔体中的气体进行在线检测。According to needs to measure the gas composition of the sub-vacuum system in experiment,the paper designed a sub-vacuum online gas detection system based on the working state of the residual gas analyzer,through simulation the design was improved and the parameters of the was determined,meanwhile,the experiment verified on-line gas detection system can effectively detect the gas in the corresponding cavity in the sub-vacuum environment (hundreds of thousands Pa).

关 键 词：在线气体检测 减压结构 亚真空 

分 类 号：TQ028[化学工程]