气化粉与湿法粉制备ITO靶材过程及性能对比研究  

Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders

作　　者：杨硕[1] 刘冠鹏[1] 赵延飞 段海洋 张伟明 YANG Shno;LIU Guanpeng;ZHAO Yanfei;DUAN Haiyang;ZHANG Weiming(Luoyang Ship Material Research Institute,Luoyang 471023,China)

机构地区：[1]中国船舶重工集团公司第七二五研究所

出　　处：《材料开发与应用》2019年第3期76-80,共5页Development and Application of Materials

基　　金：国家战略性新兴产业发展专项(发改办高技[2012]1029号)

摘　　要：分别以ITO气化粉和湿法粉为原料,在相同工艺条件下,经过球磨、造粒、成型等工序制备了ITO靶材,研究了ITO气化粉和湿法粉制靶中间品及最终靶材的主要性能。结果表明:模压和CIP后,湿法粉坯体密度均低于气化粉的,但由于ITO湿法粉原料粒径细而均匀,烧结活性更高,故在较低的烧结条件下可制备出更高密度的靶材。Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.

关 键 词：ITO气化粉 ITO湿法粉 ITO靶材 

分 类 号：TF124[冶金工程—粉末冶金]