一种互补耦合型电磁感应式直线位移传感器的研究  

Research on a Linear Inductive Displacement Sensor with Complementary Coupling Structure

作　　者：翁道纛 汤其富[1] 彭东林[1] 谷星莹 WENG Daodao;TANG Qifu;PENG Donglin;GU Xingying(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心

出　　处：《传感技术学报》2019年第7期996-1002,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金青年科学基金项目(51605062);重庆市教育委员会科学技术研究项目(KJ1709191);重庆市研究生重点科研创新项目(CYS18306)

摘　　要：由于现有直线位移传感器通常为单面耦合型,即动尺只在定尺一侧安装,所以传感器的测量性能不免受动尺与定尺间的间隙变化、平行度差等装配问题的影响。为了使传感器达到较高的测量性能,传感器的安装和运行轨迹直线度往往需要满足苛刻的要求。针对该问题,开展了一种互补耦合型电磁感应式直线位移传感器的研究。动尺对称式地位于定尺两侧,使激励线圈与感应线圈互补耦合。介绍了传感器的仿真实验和样机实验。仿真实验结果显示,的互补耦合型传感器输出的信号质量明显优于单边耦合型传感器。样机的实验结果显示,传感器在互补耦合结构下的测量误差比单面耦合结构下小90%,且受动尺与定尺之间的间隙变化影响较小。提出的互补耦合结构,不仅弥补了单面耦合结构的不足,而且为直线位移传感器的研究提供了一种新的思路。Current linear displacement sensors are typically with single face coupling structure that the moving ruler is assembled on one side of the stationary ruler,so the measuring performance of the sensors is vulnerable when the clearance and parallelism between moving ruler and stationary ruler are changed,or other assembly errors exist.To realize high measuring performance,the assembly and the trajectory straightness of this sensor must meet strict requirement.Therefore,a linear inductive displacement sensor with symmetrical structure is presented in this paper.The moving ruler with symmetrical structure across two sides of the stationary ruler makes excitation coil and induction coil keeping a complementary and coupling state.Besides,the simulation experiment shows that the signal quality from the complementary coupling sensor is distinctly better than the single face coupling sensor.And the result from the experiment of a prototype reflects that the measurement error of the complementary coupling sensor is smaller about 90% than the single face coupling sensor.Meanwhile,it also proves that the negative effect of the clearance between moving ruler and stationary ruler on the measurement error of the complementary coupling sensor is decreased.In a word,the complementary coupling structure not only covers the shortage of the single face coupling structure,but also provides a new idea for the research of linear displacement sensors.

关 键 词：直线位移传感器 互补耦合 电磁感应 时栅 

分 类 号：TP712[自动化与计算机技术—检测技术与自动化装置]