耐腐蚀高精度光电透射式液位测量仪设计  

Design of High Precision Corrosion Resistant Transmission Type Photoelectricity Level Measuring Instrument

作　　者：廖飞 张超群 李岭 龚恒翔 梁霄 杨鑫 卢丽 尹斌军 LIAO Fei;ZHANG Chao-qun;LI Ling;GONG Heng-xiang;LIANG Xiao;YANG Xin;LU Li;YIN Bin-jun(College of science,Chongqing University of Technology,Chongqing 400054,China;College of Materials Science and Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学理学院,重庆400054 [2]重庆理工大学材料科学与工程学院,重庆400054

出　　处：《仪表技术与传感器》2019年第7期38-42,47,共6页Instrument Technique and Sensor

基　　金：重庆市科委社会事业与民生保障专项一般项目(cstc2015shmszx00016);重庆理工大学实验技术开发基金项目(SK201810)

摘　　要：为解决气相沉积法制备材料过程中腐蚀性液体液位测量问题,基于液柱透镜成像原理,设计了高精度耐腐蚀的光电透射式液位测量仪。论文给出了液位测量仪的基本工作原理及结构设计、重点分析了液位特征提取算法的设计和实现过程。设计的液位测量仪能够满足透明、半透明、不透明液体的液位测量。实验结果表明,液位特征提取算法能准确识别液滴、液滴串、气泡段等异常影响。液位测量仪能在溶液结晶等较复杂工况下正常工作,并且其测量分辨率达 3.5 μm,静态测量误差小于0.02 mm,单个测量头量程为 52.5 mm,有较好稳定性,非接触式测量,耐腐蚀,可小型化,能够满足较高精度液位测量需求。To solve the vapor deposition of materials in corrosive liquid level measurement,based on the principle of liquid column lens imaging,the paper designed a transmission type photoelectric liquid level measuring instrument with high precision and resistance of corrosion.This paper presented the basic working principle and structure design of the liquid level measuring instrument,and analyzed the design and implementation process of the liquid level characteristic extraction algorithm.System design can meet the requirements of transparent,translucent,opaque liquid level measurement.Experimental results show that the liquid level feature extraction algorithm can accurately identify droplet,droplet string,bubble segment and other abnormal effects.The instrument can work well under complex conditions,such as solution crystallization.The measurement resolution of this liquid level measuring instrument is 3.5 μm and static measurement error is 0.02 mm,single measuring head ranges is 52.5 mm.With good stability,non-contact measurement,corrosion resistance,small in size and high precision,the liquid level measurement can meet the demand of high precision liquid level measuring.

关 键 词：液位测量 光电传感器 气相沉积制备设备 耐腐蚀 FPGA 

分 类 号：TH865[机械工程—仪器科学与技术] TP216[机械工程—精密仪器及机械]