一种六边形芯片自动定位测试方法的研究与实现  

Research and Implementation of Hexagonal Wafer Automatic Positioning Test Method

作　　者：郑金宝 杨刚 钟建平 刘红军 孟宪圆 李强 高今朝 ZHENG Jin-Bao;YANG Gang;ZHONG Jian-Ping;LIU Hong-Jun;MENG Xian-Yuan;LI Qiang;GAO Jin-Zhao(Qinhuangdao Audio-Visual Machinery Research Institute Co.Ltd.,Qinhuangdao Hebei 066000,China;AURORA Technologies,Guangzhou Guangdong 510288,China)

机构地区：[1]秦皇岛视听机械研究所有限公司,河北秦皇岛066000 [2]广州天极电子科技有限公司,广东广州510288

出　　处：《机电产品开发与创新》2019年第4期81-83,共3页Development & Innovation of Machinery & Electrical Products

摘　　要：探针台是半导体芯片测试的高精密仪器,可以连接测试仪,分选出晶圆里面的不合格芯片,减少后续工作的加工耗费。随着半导体行业的不断发展,芯片的种类也变得多样化,其中六边形芯片的分选测试,还没有一个快速的测试方法。文中研究并且实现了一种测试六边形芯粒的新方法,新型测试方法已经交付客户现场测试使用,测试结果得到了客户认可,解决了客户的测试难题。The probe station is the high precision instruments of semiconductor chip testing,The unqualified chips in the wafer are sorted out by connecting the tester,thus reducing the processing cost of the follow-up work.With the continuous development of the semiconductor industry,the types of chips have become diversified,in which there is no fast test method to hexagonal chip test.In this paper,a new method of testing hexagon kernel is studied and implemented.The new testing method is delivered to the customer on-site test,and the test results are recognized by the customer,which solves the test difficulty of the customer.

关 键 词：探针台 六边形芯片 自动定位测试方法 

分 类 号：TH6[机械工程—机械制造及自动化]