一种应用于角度传感器的Sigma Delta ADC设计  

Design of Sigma Delta ADC for angle sensor

作　　者：周志兴 来强涛[1] 姜宇[1] 郭江飞[1] 王成龙 陈腾 郭桂良[1] ZHOU Zhi-xing;LAI Qiang-tao;JIANG Yu;GUO Jiang-fei;WANG Cheng-long;CHEN Ten;GUO Gui-liang(Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049 [3]中国科学院大学微电子学院,北京100029

出　　处：《微电子学与计算机》2019年第8期25-29,共5页Microelectronics & Computer

基　　金：国家重点研发计划(2017YFB0503200)

摘　　要：采用XH0180.35μmCMOS工艺设计了一种应用于磁阻角度传感器的SigmaDelta调制器.由于实际运放的增益都是有限的,使得开关电容积分器的信号传输函数的极点发生偏移,进而影响ADC精度,本文采用有限增益补偿技术减小运放增益对开关电容积分器的影响.该调制器采用两阶1bit全反馈结构,信号带宽12KHz,采样频率6.25MHz.后仿结果表明,在2.5V电源电压下,调制器的整体功耗为4mW.核心电路版图尺寸为0.45mm×0.3mm.在-40℃~150℃,各个工艺角的ENOB≥16.5bit.FOM=165.A Sigma-Delta modulator for magnetoresistive angle sensor is designed using XH018 0.35 μm CMOS process. The finite gain of the actual amplifier results in a pole shift in the transfer function, which will affect the accuracy of ADC. In this paper, the finite gain compensation technique is adopted to reduce the effect of operational amplifier gain on switched capacitor integrator. The structure of the modulator is 2 Order 1 Bit full feedback, with a signal bandwidth of 12 KHz and a sampling frequency of 6.25 MHz. The simulation results show that the overall power consumption of the modulator is 4 mW under the 2.5 V supply voltage. The layout of the core circuit is 0.45 mm × 0.3 mm. At-40℃~150℃, the ENOB of each corner is greater than 16.5 bit. FOM=165.

关 键 词：角度传感器 高精度ADC SIGMA DELTA MODULATOR GAIN Compensation 

分 类 号：TN432[电子电信—微电子学与固体电子学]