电荷累加型TDICMOS探测器测试方法研究  

Research on the test methods of charge accumulating TDICMOS detector

作　　者：梁楠[1] 张斐然[1] 蔡帅 李博[1] 李涛[1] Liang Nan;Zhang Feiran;Cai Shuai;Li Bo;Li Tao(Beijing Institute of Space Mechanics and Electricity, Beijing 100094, China)

机构地区：[1]北京空间机电研究所

出　　处：《光电工程》2019年第8期31-37,共7页Opto-Electronic Engineering

基　　金：国家重点研发计划地球观测与导航重点专项(2016YFB0500802)~~

摘　　要：随着航天遥感领域对分辨率、高速传输、低功耗方面需求的提高,基于电荷累加的TDICMOS探测器应运而生。该探测器无论在工艺上还是探测器结构上均与TDICCD和传统数字累加的CMOS器件有着本质的不同。因此,许多关于探测器性能参数的测试方法无法适用于电荷累加的TDICMOS。本文基于电荷累加TDICMOS的自身特性,先后提出了关于电荷-DN转换因子、满阱电荷、电荷转移效率、读出噪声等参数的新测试方法,同时搭建TDICMOS测试系统进行实验验证。实验证明了上述测试方法的正确性和工程可实现性,为今后TDICMOS工程应用提供了重要依据。With the increasing demand for high resolution, high speed transmission and low power dissipation in space remote sensing, TDICMOS detector based on charge accumulating will become an important part of video detectors. No matter in process or in structure, the detector is essentially different from the traditional TDICCD and CMOS detector with digital accumulating. Therefore, many original methods for testing the performance parameters of the detector cannot be applied to the TDICMOS detector based on charge accumulating. This paper proposes the test methods of charge-DN factor, full well charges, transfer efficiency, readout noise based on TDICMOS characteristics. We also verify these test methods by experiment, prove the correctness of these testing methods and the feasibility of the engineering. The results provide important basis for the application of TDICMOS camera in the future.

关 键 词：TDICMOS 电荷-DN转换因子 转移效率 满阱电荷 读出噪声 

分 类 号：TN401[电子电信—微电子学与固体电子学]