基于LabVIEW和Arduino的薄膜电阻率测试系统开发  

Development of the Film Resistivity Test System Based on LabVIEW and Arduino

作　　者：孙如昊 刘禹 刘江 廖成 何绪林 陈彦秋 SUN Ruhao;LIU Yu;LIU Jiang;LIAO Cheng;HE Xulin;CHEN Yanqiu(Chengdu Development Center of Science and Technology,Chengdu 610200,China;School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China;Jiangsu Key Lab of Advanced Food Manufacturing Equipment and Technology,Jiangnan University,Wuxi 214122,China)

机构地区：[1]成都科学技术发展中心,四川成都610200 [2]江南大学机械工程学院,江苏无锡214122 [3]江南大学江苏省食品先进制造装备技术重点实验室,江苏无锡214122

出　　处：《自动化仪表》2019年第8期26-31,37,共7页Process Automation Instrumentation

基　　金：国家重点研发计划基金资助项目(2016YFB0700700);国家自然科学基金委面上基金资助项目(51875253);江苏省食品先进制造装备技术重点实验室自主研究基金资助项目(FMZ201806)

摘　　要：针对准确、快速检测半导体薄膜样品电阻率的功能需求,设计了一种具有较高自动化程度的测试系统。该系统可针对小尺寸薄膜样品进行自动化测试,改进了传统四探针测试设备单次测量效率低、对样品规格尺寸要求高的不足。系统采用四探针双电测组合法作为基本检测方法,以LabVIEW虚拟仪器平台为核心,联合下位机Arduino单片机,从机械运动模块、电子电路系统到顶层控制程序与计算流程进行一体化设计开发。重点介绍了集成压力检测功能的运动样品平台、电流注入与电压采集的电信号通路、基于虚拟仪器平台开发的系统控制软件,以及针对小尺寸薄膜样品的电阻率计算修正等模块的设计与实现。为检验该系统的工作性能与稳定性,以试验室氧化铟锡(ITO)薄膜为测试对象进行不同激励电流下的重复性试验。通过测试结果对比,证明了该测试系统的有效性与测试结果的稳定性。该系统的设计为快速自动化检测小尺寸薄膜样品的电阻率提供了有效的解决方案,其整体设计流程为多模块系统综合开发问题提供了新的思路。In order to accurately and quickly measure the resistivity of semiconductor film sample,an automated testing system has been designed.The system can automatically test small-size film samples,improving the low efficiency of traditional four-probe test equipment,and the high requirement for sample size.The system uses a four-probe dual electrical measurement combination method as the basic detection method;takes the LabVIEW virtual instrument platform as the core,combines lower machine Arduino MCU,integrated design and development from mechanical motion module,electronic circuit system to top-level control program and calculation process are implemented.The design and implementation of the motion sample platform with integrated pressure detection function,the electrical signal path for current injection and voltage acquisition,the system control software developed based on the virtual instrument platform,and the calculation of the resistivity calculation for small-size film samples are introduced.In order to test the performance and stability of the system,the laboratory Indium Tin Oxide(ITO) film was used as the test object to carry out repetitive experiments under different excitation currents.The test results are compared to prove the effectiveness of the system,and the stability of the test results.The design of this system will provide an effective solution for the rapid and automatic detection of the resistivity of small film samples,and puts forward a new idea for the comprehensive development of multi-module system.

关 键 词：LABVIEW ARDUINO 半导体薄膜材料 电阻率 四探针双电测组合法 压力反馈 数字源表 修正算法 

分 类 号：TH113[机械工程—机械设计及理论]