紫外光固化有机-无机纳米复合材料成型衍射光学元件制造技术  

Manufacturing Technology of Diffractive Optical Elements Formed by Ultraviolet-Cured Organic-Inorganic Nanocomposites

作　　者：王伦 薛常喜[1] 兰喜瑞 李闯[1] 吴百融 贾孟 王蕾[1] Wang Lun;Xue Changxi;Lan Xirui;Li Chuang;Wu Bairong;Jia Meng;Wang Lei(School of Optoelectronic Engineering,Changchun Uyiiversity of Science and Technology,Changchun,Jilin 130022,China)

机构地区：[1]长春理工大学光电工程学院

出　　处：《光学学报》2019年第7期305-310,共6页Acta Optica Sinica

基　　金：国家自然科学基金(60878030)

摘　　要：针对衍射光学元件制造中材料选择的局限以及遮挡效应,采用了紫外光固化有机-无机纳米复合材料快速成型技术制造衍射光学元件,获得高折射率、高色散的衍射光学元件。通过有机-无机纳米复合材料制备实验获得了一种适合制造衍射光学元件的复合材料配方,配方各成分包括质量分数为57.97%的2官脂肪族聚氨酯丙烯酸酯(2PUA)、质量分数为38.64%的季戊四醇三丙烯酸酯(PETA)、质量分数为1.45%的光引发剂184(Irgacure 184)、质量分数为1.93%的分散剂163(disperbyk 163)和质量分数可控的纳米粒子ITO。使用该方法制备了紫外光固化衍射光学元件,并使用台阶仪测量得到衍射光学元件模芯表面的平均微结构高度为13.26μm,光固化衍射光学元件表面的平均微结构高度为12.58μm,使用光固化衍射光学元件与模芯微结构的相对误差为5.141%。紫外光固化有机-无机纳米复合材料的衍射光学元件制造技术突破了材料选择局限,减小了遮挡误差,对宽波段的折衍射混合光学系统的快速成型具有重要意义。By considering the limitations of material selection and shielding effect associated with the manufacturing of diffractive optical elements, this study introduces the fabrication of diffractive optical elements based on the rapid prototyping technology of the ultraviolet(UV)-cured organic-inorganic nanocomposites. Thus, we can obtain diffractive optical elements exhibiting a high refractive index and a high dispersion. Further, a composite formulation suitable for manufacturing diffractive optical elements is obtained based on an experiment on the organic-inorganic nanocomposite preparation. The formulation contains aliphatic polyurethane acrylate(2 PUA) with mass fraction of 57.97%, pentaerythritol triacrylate(PETA) with mass fraction of 38.64%, photoinitiator 184(Irgacure 184) with mass fraction of 1.45%, dispersant 163(Disperbyk 163) with mass fraction of 1.93%, and ITO nanoparticles with controllable mass fraction. Diffractive optical elements are fabricated using this method. The average microstructural height of the mold-core surface of the diffractive optical elements measured using the step instrument is 13.26 μm. Subsequently, we fabricate the UV-cured diffractive optical elements. Further, the average surface microstructural height of the diffraction optical elements using UV-cured organic-inorganic nanocomposites is 12.58 μm. The relative error between the diffraction optical elements and the mold-core microstructures fabricated by the UV-cured organic-inorganic nanocomposites is 5.141%. The manufacturing technology of diffractive optical elements for the UV-cured organic-inorganic nanocomposites overcomes the limitation of material selection and reduces the occlusion error, making it considerably significant for the rapid prototyping of the refractive-diffractive hybrid optical systems in a wide band.

关 键 词：光学设计 紫外光固化 有机-无机纳米复合材料 衍射光学元件 相对误差 

分 类 号：O436[机械工程—光学工程]