高速宏微运动平台及精密定位方法  

High speed macro-micro motion stage and precision positioning method

作　　者：张金迪 高健[1] 谭宇韬 张揽宇 赵光同 万宇 ZHANG Jindi;GAO Jian;TAN Yutao;ZHANG Lanyu;ZHAO Guangtong;WAN Yu(Key Laboratory of Microelectronic Precision Manufacturing Technology and Equipment Educationof Ministry of Education,Guangdong University of Technology,Guangzhou 510006,CHN)

机构地区：[1]广东工业大学微电子精密制造技术与装备教育部重点实验室

出　　处：《制造技术与机床》2019年第8期117-121,共5页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金项目(51675106,U1601202);广东高校建设重大科研项目(17ZK0091)

摘　　要：围绕微电子精密制造封装装备的高性能要求,在宏微复合定位技术的基础上,提出一种新型宏微复合精密定位平台及其精密定位方法。首先利用ADAMS/view对平台进行动力学分析与仿真,明确弹簧刚度与预紧力因素对系统性能的影响,使得符合封装装备高频往复的工作要求。然后提出宏微复合运动的PID切换控制方法,实现平台的控制系统开发,搭建其宏微复合定位平台,并开展其定位性能的实验。结果表明,在速度为0.25m/s,加速度为5g的20mm运行条件下,平台能够实现40nm的定位精度且稳定时间小于105ms。Around the high performance requirements of microelectronic precision manufacturing package equipment and on the basis of macro and micro positioning technology,a new type of macro micro composite precision positioning stage and its precise positioning method are proposed.Firstly,using the ADAMS/view to simulation the dynamic of the stage,and confirm the spring stiffness and the preload influence on the performance of the system.Then a PID switching of macro micro composite motion control method was proposed to realize the development of the stage's control system.The macro micro composite positioning stage has been built.And the positioning performance experiment was carried out.The experimental results show that the stage has fast and high precision and large stroke positioning performance.The results show that under the condition of 20 mm operation speed of 0.25 m/s and acceleration of 5 g,the stage can achieve 40 nm precision positioning accuracy,and the stability time is less than 105 ms.

关 键 词：宏微复合平台 音圈电动机 压电陶瓷 双PID定位方法 动力学 

分 类 号：TH-39[机械工程]