基于光纤光栅的高灵敏度位移传感器研制  

Development of High Sensitivity Optical Fiber Displacement Sensor Based on Fiber Bragg Grating

作　　者：郭振[1,2] 张文华 杨辉 代志国[1] 吴昺炎[1] 周少玲[1] 高侃[1] GUO Zhen;ZHANG Wenhua;YANG Hui;DAI Zhiguo;WU Bingyan;ZHOU Shaoling;GAO Kan(The 23rd Research Institute, CETC, Shanghai 200437, China;Shanghai Engineering Research Center of Optical Transmission and Sensing Technology, Shanghai 200437, China)

机构地区：[1]中国电子科技集团公司第二十三研究所,上海200437 [2]上海光传输与光传感工程技术研究中心,上海200437

出　　处：《光纤与电缆及其应用技术》2019年第4期17-19,40,共4页Optical Fiber & Electric Cable and Their Applications

摘　　要：研究了一种基于光纤光栅的高灵敏度位移传感器。首先理论分析了圆环结构光纤光栅型位移传感器的原理并确定结构参数。然后采用非胶封装工艺和双光栅工作方式,解决了光栅的封装稳定性和温度-应力交叉敏感问题。最后根据实际需求制作样品并进行试验验证,测得该传感器的位移灵敏度为116.9 pm/mm,相当于单光栅结构传感器的平均位移灵敏度58.6 pm/mm的1.99倍,且在20~70℃温度范围内,波长的测量误差值为±3 pm,有效控制了光纤光栅型传感器的温度-应力交叉敏感问题。A high sensitivity displacement sensor based on fiber Bragg grating (FBG) is studied. Firstly, the principle of FBG displacement sensor with ring structure is analyzed theoretically and the structure parameters are determined. Then non-adhesive packaging technology and double FBGs mode are used to solve the problem of packaging stability and temperature-stress cross-sensitivity of FBG-based sensor. Finally, samples are made according to actual needs and verified by experiments. The displacement sensitivity of the displacement sensor is 116. 9 pm/ mm, which is 1. 99 times of the average displacement sensitivity 58. 6 pm/mm of the single-FBG displacement sensor. In the temperature range of 20.70 ℃, the error value of wavelength measurement is limited within ±3 pm, which effectively controls the temperature-stress cross-sensitivity of the FBG-based sensor.

关 键 词：位移传感器 光纤布拉格光栅 灵敏度 

分 类 号：TN253[电子电信—物理电子学]