等离子体辅助原子层沉积技术包覆硅基氮化物荧光粉的结果性能研究  

Study on Performance of Silicon-Based Nitride Phosphors Coated by Plasma-Assisted Atomic Layer Deposition

作　　者：张子欣 刘忠伟[1] 杨丽珍[1] 陈强[1] ZHANG Zi-xin;LIU Zhong-wei;YANG Li-zhen;CHEN Qiang(Lab of Plasma Physics and Materials,Beijing Institute of Graphic Communicaiion,Beijing,102600)

机构地区：[1]北京印刷学院等离子体物理与材料实验室

出　　处：《真空》2019年第4期19-23,共5页Vacuum

基　　金：国家自然科学基金项目(NO.11875090)

摘　　要：采用等离子体辅助原子层沉积的方法,通过振动流化床,在硅基氮化物荧光粉表面保形地包覆了氧化铝薄膜。分别用傅立叶红外光谱(FTIR)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)和pH计对包覆前后荧光粉的表面成分、形貌和耐水性进行了测试。最后,还用荧光光谱仪对包覆前后荧光粉的PL发光进行了表征。结果表明,氧化铝被保形地包覆在荧光粉颗粒表面。包覆大大提升了荧光粉在水中的稳定性。包覆一定厚度的氧化铝对发光性能有所提升并可以略微降低荧光粉的色温。A plasma-assisted atomic layer deposition method was used to conformally coat the Al2O3 films on the surface of silicon-based nitride phosphor powders by a vibrating fluidized bed.The surface composition,morphology and water resistance of the phosphors before and after coating were tested by the Fourier transform infrared spectroscopy,scanning electron microscopy,transmission electron microscopy and pH meter.The PL luminescence of the phosphor before and after coating was tested by a fluorescence spectrometer.The results show that the alumina is conformally coated on the surface of the phosphor particles.The coating greatly enhances the stability of the phosphor in water.A certain thickness of alumina coating improves the luminescence performance and slightly reduces the color temperature of the phosphor powders.

关 键 词：等离子体辅助原子层沉积 包覆 硅基氮化物荧光粉 

分 类 号：TB34[一般工业技术—材料科学与工程]