微细中空电极流速测试及侧壁绝缘层制备工艺比较  

Flow Rate Test of Micro Hollow Electrode and Comparison of Preparation Process of Sidewall Insulation Layer

作　　者：温杰超 孔全存[1,2,3] 李勇[2] 钟浩 刘桂礼[1] WEN Jiechao;KONG Quancun;LI Yong;ZHONG Hao;LIU Guili(School of Instrumentation Science and Opto-Electronics Engineering,Beijing Information Science and Technology University,Beijing 100192,China;Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China;Institute of Precision Measuring Technology and Instruments,Beijing InformationScience and Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192 [2]清华大学机械工程系,北京100084 [3]北京信息科技大学精密测量技术与仪器研究所,北京100192

出　　处：《电加工与模具》2019年第4期33-39,共7页Electromachining & Mould

基　　金：国家自然科学基金面上项目（51675054,51775302）;北京市自然科学基金资助项目（3172013）;北京市教委科技发展计划面上项目（KM201711232005）

摘　　要：针对孔径100~200μm、采用中空供液工艺的高深宽比微细电解加工中,中空电极流速难以在线测量,侧壁绝缘层易出现损伤、脱落等问题,利用不同压力下流速雾化现象在光照下的差异性,建立压力-流速-雾化面积比关系曲线,实现在线流速测试并优化了初始供液压力。通过比较加工孔和加工后电极表面形貌,优选出丙烯酸环氧树脂绝缘层制备工艺,并在304不锈钢片上加工出入口直径180.6μm、出口直径173.8μm、锥度约0.78°的阵列孔,验证了方法应用的可行性。For high-aspect ratio micro-electrolysis machining using hollow liquid supply process against a hole diameter of 100~200 μm,the flow velocity of the hollow electrode is difficult to on-line measure,and the sidewall insulation layer is prone to be damaged. Using difference of atomization phenomenon under illumination,the pressure-flow rate-atomization area ratio curve is established to realize the online flow rate test and optimize the initial supply pressure. By comparing the surface morphology of the machined hole and the processed electrode,an epoxy resin epoxy layer is preferred,and the processing array holes of 180.6 μm inlet,173.8 μm outlet and taper of 0.78° were fabricated on 304 stainless steel sheets,which verified the application feasibility of the method.

关 键 词：微细电解加工 中空电极 流速测试 侧壁绝缘 电泳 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]