聚苯乙烯紫外激光打孔试验研究  

Experimental Study on Ultraviolet Laser Drilling of Polystyrene

作　　者：王军[1] 周亮 付海涛 彭杨 WANG Jun;ZHOU Liang;FU Haitao;PENG Yang(Mechenical and Elecrical Engineering,Harbin Institute of Technology,Harbin 150001,China;Beijing Aerospace Petrochemical Technology Equipment Engineering Co., Ltd.,Beijing 100176,China;Capital Aerospace Machinery Co., Ltd.,Beijing 100076,China)

机构地区：[1]哈尔滨工业大学仪器科学与工程学院,黑龙江哈尔滨150001 [2]北京航天石化技术装备工程有限公司,北京100176 [3]首都航天机械有限公司,北京100076

出　　处：《电加工与模具》2019年第4期54-57,共4页Electromachining & Mould

摘　　要：聚合物材料靶球由于其低密度、低原子序数和较好的加工性能成为了制备核聚变微孔靶球的首选。为了实现聚合物微孔靶球的加工,对聚苯乙烯材料采用波长为355nm纳秒紫外激光进行了打孔试验,通过对不同激光能量作用下聚苯乙烯蚀除前后的XPS谱进行分析,探讨了紫外激光与聚苯乙烯打孔作用过程中化学键断裂机制,并研究不同激光工艺参数对孔深、孔径及打孔质量效率的影响规律。结果表明:在低单脉冲能量、低重复频率下,光化学作用明显,孔的质量较好,在高能量密度下,光热效应逐渐增强,通过提高重复频率可达到较高的蚀除率。微孔形成是光热与光化学蚀除综合作用的结果,该研究对核聚变靶球微孔高效精密的加工具有指导意义。Polymers have been suggested to be the first choice for making nuclear fusion microporous target balls due to their low density,low atomic number and good processability. In order to realize the drilling of micro-holes on polymer target balls,the experiment of drilling polystyrene materials with 355 nm nanosecond ultraviolet laser was carried out in this paper. By analyzing XPS spectra before and after polystyrene drilling under different laser energy,the mechanism of carbon bond breaking in the process was analyzed,and the mechanism of ultraviolet laser drilling on polystyrene was revealed in combination with the influence of different laser processing parameters on hole depth,hole diameter,drilling quality and efficiency. The results show that the photochemical effect is obvious and the processing quality is better at the lower single pulse energy and lower repetition frequency. At higher energy densities,The photothermal effect gradually increases and higher ablation rates can be achieved by increasing the repetition rate. The microholes are the result of combination of both photothermal and photochemical effects,and this study guides significance for the high efficiency and quality microhole drilling on nuclear fusion target balls.

关 键 词：紫外激光 光热作用 光化学作用 微孔加工 

分 类 号：TG456.7[金属学及工艺—焊接]