基于横向振动模式的压电元件研究  

Study on Piezoelectric Element Based on Lateral Vibration Mode

作　　者：靳遥 李永川[2] 马腾 刘忠侠[1] JIN Yao;LI Yongchuan;MA Teng;LIU Zhongxia(Institute of Physical Science and Engineering, Zhengzhou University, Zhengzhou 450001,China;Paul C. Lauterbur ResearchCenter For Biomedical Imaging, Shenzhen Institute of Advanced Technology Chinese Academy of Sciences, Shenzhen 518055,China)

机构地区：[1]郑州大学物理工程学院,河南郑州450001 [2]中国科学院深圳先进技术研究院保罗·C·劳特伯生物医学成像研究中心,广东深圳518055

出　　处：《压电与声光》2019年第4期566-569,共4页Piezoelectrics & Acoustooptics

基　　金：国家重大科研仪器研制基金资助项目(Y520051001)

摘　　要：为了解决大规模超声阵列中压电元件电阻抗匹配难度增加的问题,提出一种多层的基于横向振动模式的压电元件构造方法。利用压电陶瓷具有多种振动模式的特性,将基于厚度振动模式工作的压电元件转换为基于横向振动模式工作,在此过程中,压电元件振动方向不变,电极面积增加,间距减小从而其固定电容增加,电阻抗降低。该文提出了一种双层结构模式转换压电元件的构造方法,结合仿真分析,设计了基于横向振动模式压电元件,不进行阻抗匹配,其电阻抗降至约50Ω。In order to solve the problem of increased electric impedance matching difficulty of piezoelectric elements in large-scale ultrasonic arrays, a multilayer piezoelectric element construction method based on transverse vibration mode is proposed. Based on the characteristics of piezoelectric ceramics with multiple vibration modes, the piezoelectric elements working in thickness vibration mode are converted into transverse vibration mode. In this process, the vibration direction of piezoelectric components is unchanged, the area of electrode increases and the distance between electrodes decreases, so that the fixed capacitance increases and the electrical impedance decrease. In this paper, a two-layer structure mode conversion method for the piezoelectric element is proposed. Combined with the simulation analysis, the piezoelectric elements based on transverse vibration mode are designed. Without impedance matching, the electric impedance is reduced to nearly 50 Ω.

关 键 词：压电元件 横向振动 双层结构 电阻抗降低 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]