石墨烯纳机电谐振式传感器研究进展  

Research Process on Graphene-based Nano-electromechanical Resonant Sensors

作　　者：樊尚春[1,2] 朱黎明 邢维巍 FAN Shangchun;ZHU Liming;XING Weiwei(School of Instrumentation Science and Opto-electronics Engineering,Beihang University,Beijing 100191,China;Key Laboratory of Quantum Sensing Technology(Beihang University),Ministry of Industry andInformation Technology,Beijing 100191,China)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191 [2]工信部量子传感技术重点实验室,北京100191

出　　处：《计测技术》2019年第4期1-11,共11页Metrology & Measurement Technology

基　　金：国家自然科学基金资助项目(61773045,61721091);长江学者和创新团队发展计划资助(IRT_16R02)

摘　　要：石墨烯是一种新型的二维纳米材料,因独特的电学和力学性质而备受关注。近年来,一系列针对石墨烯谐振特性及其应用的研究得到广泛开展,已显示出石墨烯在谐振式纳机电传感器领域巨大的应用潜力。简要描述了石墨烯优异的物理性能和目前主要的几种石墨烯制备工艺现状,重点介绍了近期石墨谐振器的实验、理论研究以及石墨烯谐振器在压力、加速度和质量等物理量传感器方面的应用进展,其中主要围绕石墨烯谐振敏感结构、敏感机理和研究方法等方面进行评述,并分析了石墨烯谐振式传感器研发所面临的挑战和发展前景。Graphene is a novel two-dimensional nanomaterial with remarkable electrical and mechanical properties,which has attracted considerable attention.In recent years,a series of studies on the resonant characteristics of graphene and its applications are widely carried out,which indicates the great potential of graphene for the field of resonant nano-eletromechanical sensors.This paper briefly introduces the excellent physical properties of graphene material and several typical preparation technologies for graphene.Then,the paper emphatically reviews the experimental and theoretical studies of graphene resonators as well as its application process on the detection of pressure,acceleration,mass,etc.The main aspects are as follows: resonance sensitive structures based on graphene,sensing mechanisms and research methods,etc.The possible challenges and development prospects of graphene-based resonant nano-electromechanical sensors are also analyzed.

关 键 词：石墨烯 谐振 纳机电 传感器 综述 

分 类 号：TB9[一般工业技术—计量学] TP212.1[机械工程—测试计量技术及仪器]