垂直耦合悬空型氮化硅微盘光学传感器  

Vertically Coupled Suspended Silicon Nitride Microdisk Based Optical Sensor

作　　者：冉纲林 顾昌林 仲路铭 张福领[3] 武腾飞[4] 冯吉军 RAN Ganglin;GU Changlin;ZHONG Luming;ZHANG Fuling;WU Tengfei;FENG Jijun(Henan SD Electric Vehicle Technology Co.,Ltd,Sanmenxia 472000,China;Shanghai Key Laboratory of Modern Optical System,School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;The 27th Institute of China Electronic Technology Group Company,Zhengzhou 450047,China;Changcheng Institute of Metrology & Measurement,Science and Technology onMetrology and Calibration Laboratory,Beijing 100095,China)

机构地区：[1]河南速达电动汽车科技有限公司,河南三门峡472000 [2]上海理工大学光电信息与计算机工程学院上海市现代光学系统重点实验室,上海200093 [3]中国电子科技集团公司第二十七研究所,河南郑州450047 [4]航空工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2019年第4期44-49,共6页Metrology & Measurement Technology

基　　金：国家自然科学基金(11774235,61705130,11727812);上海市自然科学基金(17ZR1443400);上海市青年科技启明星计划(19QA1406100);上海市高校特聘教授(东方学者)岗位计划

摘　　要：提出了一种垂直耦合型悬空氮化硅微盘谐振型传感器,该传感器由一个底部非悬空的接入波导和一个顶部悬空的微盘腔组成,并用实验证明了其具有较高的器件灵敏度和良好的机械稳定性。对于半径40μm的微盘,在1548.98nm谐振波长下可以实现超过104的品质因数以及大小适中、5.66nm的自由光谱范围。该传感器的灵敏度可通过覆盖不同的有机液体来测量,实验测得值约为554nm/RIU。该三维传感器的制备与传统的光刻工艺相兼容,利于大批量低成本生产,同时凭借器件尺寸小、工艺简单、检测灵敏度高、响应快、免标记等特点,在国防安全、生物检测和环境监测等方面具有广阔的应用前景。A vertically coupled suspended silicon nitride resonator sensor is experimentally demonstrated,which consists of a bottom-layer un-suspended access waveguide and a top-layer suspended micro-disk cavity.The presented sensor can realize a high device sensitivity with a good mechanical stability.For a 40 μm-radius disk,a quality factor of over 10 4 and a moderate free-spectral range of 5.66 nm can be obtained at a resonant wavelength of 1548.98 nm.The sensitivity of the sensor can be measured by covering different organic liquids,and the experimental value is about 554 nm/RIU.The fabrication of the proposed three-dimensional sensor is compatible with the conventional photolithography process,which would benefit its mass production at low cost.At the same time,due to its characteristics of small size,simple process,high sensitivity,fast response and mark-free,the sensor has broad application prospects in national defense safety,biological dection and environment monitoring and other aspects.

关 键 词：光学微腔 悬空型微盘 集成光学 传感器 

分 类 号：TB9[一般工业技术—计量学]