飞秒激光加工材料的研究现状及展望  

Research status and prospect of femtosecond laser processing of materials

作　　者：肖凯恒 李明翱 谢扬 张翔博 乔军[1] XIAO Kaiheng;LI Mingao;XIE Yang;ZHANG Xiangbo;QIAO Jun(School of Materials and Metallurgy,University of Science and TechnologyLiaoning,Anshan 114051,China)

机构地区：[1]辽宁科技大学材料与冶金学院

出　　处：《辽宁科技大学学报》2019年第3期179-185,共7页Journal of University of Science and Technology Liaoning

基　　金：辽宁省自然科学基金重点项目(20170540460);辽宁省大学生创新创业项目(201810146014)

摘　　要：简介了飞秒激光的诞生,阐述了飞秒激光对材料的作用机理,讨论了飞秒激光加工材料的表面热积累效应、激光抛光原理和工艺及表面微纳米结构方面的研究现状。总结了这些方面所面临的主要问题,并指出飞秒激光的加工方向。The invention of femtosecond is briefly introduced,and the interactive mechanisms between femtosecond lasers and materials are elaborated.The research progresses in heat accumulation,technology and mechanism of laser polishing,and laser-induced micro/nano surface structure are discussed,and the related difficulties are summarized.The future research on femtosecond laser processing are proposed.

关 键 词：飞秒激光 热效应 激光抛光 微纳米结构 

分 类 号：TN249[电子电信—物理电子学]