Magnetron sputtered Dy2O3 with chromium and copper contents for antireflective thin films with enhanced absorption  

作　　者：Shahid M. Ramay Asif Mahmood Hamid M. Ghaithan Nasser S. Al-Zayed Adnan Aslam Abdullah Murtaza Nisar Ahmad Saadat A. Siddiqi Murtaza Saleem 

机构地区：[1]Physics and Astronomy Department,College of Science,King Saud University Riyadh,Saudi Arabia [2]Chemical Engineering Department,College of Engineering,King Saud University Riyadh,Saudi Arabia [3]Department of Physics,The University of Lahore,1-KM Raiwind Road,Lahore. Pakistan [4]Interdisciplinary Research Centre in Biomedical Materials,COMSATS Institute of Information Technology,Defence Road,Off Raiwind Road,Lahore Pukiston [5]Department of Physics,SBASSE,Lahore University of Management Sciences (LUMS),Lahore 4792,Pakisran

出　　处：《Journal of Rare Earths》2019年第9期989-994,I0004,共7页稀土学报（英文版）

基　　金：the Deanship of Scientific Research at King Saud University for funding under Research Group(No.RG 1435-004)

摘　　要：Dy2O3 is a rare earth oxide having a number of advanced applications in various fields including protective or antireflective coatings,Main objective of this novel research work is to check the effect of Cr and Cu addition on different properties of Dy2O3 and achievement of antireflective thin films with enhanced abso rption.Thin films of these materials we re deposited using DC magnetron with reactive cosputtering.XRD studies reveals the crystalline nature of thin films having Dy2O3(222)reflection in all samples with Cr2O3(116)and CuO(111)reflections in Cr and Cu containing compositions.Field emission scanning electron microscopy demonstrates the homogeneous deposition of thin films with uniform shape,size and distribution of grains.Refractive index,extinction coefficient and absorption coefficient significantly increase while optical reflectance decreases with Cr and Cu mediation corroborating an improved antireflective mechanism.The imaginary part of dielectric constant is found to increase slightly with low tangent loss for Cr containing composition co nsidered favorable for energy storage applications.Dy2O3 is a rare earth oxide having a number of advanced applications in various fields including protective or antireflective coatings, Main objective of this novel research work is to check the effect of Cr and Cu addition on different properties of Dy2O3 and achievement of antireflective thin films with enhanced abso rption. Thin films of these materials we re deposited using DC magnetron with reactive cosputtering. XRD studies reveals the crystalline nature of thin films having Dy2O3（222） reflection in all samples with Cr2O3（116） and CuO（111） reflections in Cr and Cu containing compositions. Field emission scanning electron microscopy demonstrates the homogeneous deposition of thin films with uniform shape, size and distribution of grains. Refractive index, extinction coefficient and absorption coefficient significantly increase while optical reflectance decreases with Cr and Cu mediation corroborating an improved antireflective mechanism. The imaginary part of dielectric constant is found to increase slightly with low tangent loss for Cr containing composition co nsidered favorable for energy storage applications.

关 键 词：Thin films DYSPROSIUM oxide X-ray diffraction FESEM Optical properties Anti-reflective 

分 类 号：TF[冶金工程]