基于叠层扫描成像技术的成像透镜透射波前测量方法  

Method to Measure Transmitting Wave-Front of Imaging Lens Based on Extended Ptychographical Iterative Engine

作　　者：纵榜铭 栾嘉蕴 蒋志龙 孔艳[1] 王绶玙[1] 刘诚[1] Zong Bangming;Luan Jiayun;Jiang Zhilong;Kong Yan;Wang Shouyu;Liu Cheng(School of Science , Jiangnan University ,Wujcij Jiangsu 214122,China)

机构地区：[1]江南大学理学院

出　　处：《中国激光》2019年第8期131-137,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(U1730132,61705092);江苏省自然科学基金(BK20170194,BK20180598)

摘　　要：将叠层扫描成像技术(ePIE)用于成像透镜透射波前的高精度测量。将透镜的透射光束照射至一个固定于二维扫描台的衍射物上,并在其后的探测器上形成衍射光斑,扫描台横向扫描并记录衍射物在每个位置所形成的衍射光斑,采用ePIE精确重建衍射物体的光场复振幅,并据此反演出透镜后表面的透射光波前;移去透镜后重复上述步骤,可以重建入射到透镜上的光束波前;将透射波前减去入射波前即可得到透镜的透射波前。该方法具有准确性高、结构简单、成本低廉等优点。An extended ptychographical iterative engine(ePIE)-based method is proposed to accurately measure the transmitting wave-front of an imaging lens. The laser beam exiting the imaging lens is illuminated on a diffraction object fixed on a two-dimensional scanning stage, and the diffraction pattern is formed on the subsequent detector. The scanning stage transversely scans and records the diffraction pattern formed by the diffraction object at each position. The complex amplitude of the laser field incident on the diffraction object is faithfully reconstructed from the recorded diffraction pattern using the proposed ePIE algorithm, and the wave-front of the transmitted laser on the rear surface of the lens is retrieved using the Fresnel equations. Additionally, the wave-front illuminated on the lens can be reconstructed by repeating the above mentioned procedures after the lens is removed. Then, the transmitting wave-front of the lens is obtained by subtracting the illuminated wave-front from the exiting wave-front. The proposed method has several advantages including high accuracy, simple structure, and low cost.

关 键 词：测量 透镜透射波前 叠层扫描成像技术 衍射成像 波前重建 

分 类 号：O436[机械工程—光学工程]