Influence of Si Content on Properties of Ti1-xSixN Coatings  

作　　者：WAN Qiang LIU Nian YANG Bing LIU Huidong CHEN Yanming 万强;LIU Nian;YANG Bing;LIU Huidong;CHEN Yanming(School of Engineering,Huazhong Agricultural University,Wuhan 430070,China;School of Power & Mechanical Engineering,Wuhan University,Wuhan 430072,China)

机构地区：[1]School of Engineering,Huazhong Agricultural University,Wuhan 430070,China [2]School of Power & Mechanical Engineering,Wuhan University,Wuhan 430072,China

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2019年第4期774-780,共7页武汉理工大学学报（材料科学英文版）

基　　金：Funded by the National Natural Science Foundation of China(U1832127)

摘　　要：To investigate the evolution of microstructure and wear behavior of TiSiN coatings with the variation of Si in targets and lays the foundation for its controllable mass production, Ti1-xSixN composite coatings were deposited onto Si(100) and cemented carbide substrates using TiSi targets with different Si content by cathodic arc ion plating. The influences of Si on the microstructure and mechanical properties were studied. Nano-amorphous composite structure appeared in the Ti1-xSixN coatings when Si content in TiSi target was higher than 5 at%. However, further increase of Si content in TiSi target exhibited a negligible effect on the microstructure of Ti1-xSixN coatings. Hardness and deformation resistance were correlated to the content of Si in TiSi targets. Maximum hardness was obtained as the Si content in target increased up to 20 at%. Friction coefficient and wear rate significantly decreased with addition of Si in TiN coating, and then dually increased with the increase of Si content in targets.To investigate the evolution of microstructure and wear behavior of TiSiN coatings with the variation of Si in targets and lays the foundation for its controllable mass production, Ti1-xSixN composite coatings were deposited onto Si（100） and cemented carbide substrates using TiSi targets with different Si content by cathodic arc ion plating. The influences of Si on the microstructure and mechanical properties were studied. Nano-amorphous composite structure appeared in the Ti1-xSixN coatings when Si content in TiSi target was higher than 5 at%. However, further increase of Si content in TiSi target exhibited a negligible effect on the microstructure of Ti1-xSixN coatings. Hardness and deformation resistance were correlated to the content of Si in TiSi targets. Maximum hardness was obtained as the Si content in target increased up to 20 at%. Friction coefficient and wear rate significantly decreased with addition of Si in TiN coating, and then dually increased with the increase of Si content in targets.

关 键 词：cathodic ARC ion PLATING Ti(1-x)SixN coating silicon CONTENT NANOCOMPOSITE mechanical properties WEAR resistance 

分 类 号：TB[一般工业技术]