三靶共溅射纳米复合Cr-Al-Si-N涂层的制备及摩擦学性能研究  

Preparation and Tribological Properties of Cr-Al-Si-N Nanocomposite Coatings by Three Target Co-sputtering

作　　者：王铁钢[1] 蒙德强 李柏松[1] 赵彦辉[2] 刘艳梅[1] 姜肃猛[2] WANG Tie-gang;MENG De-qiang;LI Bai-song;ZHAO Yan-hui;LIU Yan-mei;JIANG Su-meng(Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin 300222,China;Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China)

机构地区：[1]天津职业技术师范大学天津市高速切削与精密加工重点实验室,天津300222 [2]中国科学院金属研究所,沈阳110016

出　　处：《表面技术》2019年第9期78-86,共9页Surface Technology

基　　金：国家自然科学基金项目(51301181,51875555);天津市科技军民融合重大专项项目(18ZXJMTG00050);中青年骨干创新人才培养计划项目(RC180203);天津职业技术师范大学校级科研项目(KJ1812);研究生创新基金项目(YC18-02)~~

摘　　要：目的利用高功率脉冲磁控溅射技术离化率高、溅射离子能量高等优点,在Cr-Al-N涂层中添加Si元素研制a-Si3N4包裹nc-(Cr,Al)N的纳米复合涂层,通过改变反应沉积时的N2/Ar比来调控涂层成分与结构,实现纳米复合Cr-Al-Si-N涂层性能优化。方法采用高功率脉冲与脉冲直流复合磁控溅射技术制备Cr-Al-Si-N涂层。利用扫描电镜、X射线衍射仪、能谱仪、应力仪、纳米压痕仪、划痕测试仪和摩擦试验机,研究N2/Ar比对涂层成分、结构、力学性能以及摩擦学行为的影响。结果涂层主要由面心立方结构的CrN与AlN相组成,且沿(200)晶面择优生长。当N2/Ar流量比为3∶1时,涂层与基体结合最好,临界载荷约为36.5N;摩擦系数和内应力较低,分别为0.5和-0.48GPa。当N2/Ar流量比为4∶1时,H/E值和H^3/E^*2值升至最高,分别为0.11和0.24GPa,磨损率最低,约为1.9×10^-4μm^3/(N·μm)。结论当N2/Ar流量比为4∶1时,三靶共溅射制备的Cr-Al-Si-N涂层硬度较高,耐磨性能最好。The work aims to prepare nanocomposite Cr-Al-Si-N coatings with nc-(Cr,Al)N coated by a-Si3N4 by adding Si element to Cr-Al-N coating through advantages of high ionization rate and high sputtering energy in high power impulse magnetron sputtering technology and then control the microstructure and compositions of coatings by varying the N2/Ar ratio during the reactive deposition to improve the coating performance.Cr-Al-Si-N coatings were prepared by high power pulse and pulsed DC composite magnetron sputtering.The influence of N2/Ar ratio on the composition,microstructure and mechanical and tribological properties of the Cr-Al-Si-N coating were investigated systematically in virtue of scanning electronic microscope, X-ray diffractometer,energy spectrometer,stress tester,nano-indenter,scratch tester,and friction tester.The coatings were composed of face-centered cubic CrN and AlN phase and all the coatings exhibited (200) preferred orientation.The adhesion of coating/substrate was the best as the N2/Ar ratio was 3∶1 and the critical load reached about 36.5 N.The friction coefficient and internal stress were as low as 0.5 and -0.48 GPa,respectively.When the N2/Ar ratio was 4∶1,the H/E and H^3/E^*2 reached a maximum value of 0.11 and 0.24 GPa,respectively,and the wear rate linearly decreased to 1.9×10^-4 μm^3/(N·μm).When the N2/Ar ratio is 4:1,the Cr-Al-Si-N coating prepared by three-target co-sputtering has higher hardness and better wear resistance.

关 键 词：高功率脉冲磁控溅射 脉冲直流磁控溅射 三靶共溅射 纳米复合涂层 Cr-Al-Si-N涂层 N2/Ar流量比 临界载荷 摩擦系数 磨损率 

分 类 号：TG174.442[金属学及工艺—金属表面处理]