304不锈钢管内壁沉积耐磨防腐DLC涂层  

Deposition of Anti-corrosion and Wear-resisting DLC Coatings on Inner Wall of 304SS Tube

作　　者：魏徐兵 张明蓝 王焱 鲁志斌[1,2] 张广安 林博[3] WEI Xu-bing;ZHANG Ming-lan;WANG Yan;LU Zhi-bin;ZHANG Guang-an;LIN Bo(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;University of Chinese Academy of Sciences,Beijing 100049,China;Guangxi Liugong Machinery Co.,Ltd,Liuzhou 545007,China)

机构地区：[1]中国科学院兰州化学物理研究所,兰州730000 [2]中国科学院大学,北京100049 [3]广西柳工机械股份有限公司,广西柳州545007

出　　处：《表面技术》2019年第9期87-96,共10页Surface Technology

基　　金：广西科技重大专项(AA18242002)~~

摘　　要：目的将HiPIMS电源应用于PECVD技术,在304不锈钢管内壁沉积DLC涂层,以提高其机械、耐蚀及摩擦学性能。方法将HiPIMS电源应用于PECVD技术,并利用空心阴极放电效应在管道内产生高密度等离子体,沉积DLC涂层。通过拉曼光谱、扫描电子显微镜和EDS对DLC涂层的结构和成分进行表征,并通过纳米压痕测试、划痕试验、静态极化曲线和摩擦磨损试验,分别评价304不锈钢管基底和DLC涂层的硬度、膜基结合力、耐腐蚀性能、摩擦学性能和耐磨性。结果HiPIMS电源应用于PECVD技术可在304不锈钢管内壁沉积DLC涂层。DLC涂层的厚度可达5.60~10.26μm,硬度可达10~15GPa,与304管内壁的结合力(Lc2)均大于7N。DLC涂层的腐蚀电流密度较304不锈钢管基底降低了一个数量级,腐蚀电位也发生了正移。DLC涂层具有良好的润滑效果,摩擦系数低至0.06~0.18,磨损率低至2.5×10^-7~8.1×10^-7mm^3/(N·m),远低于304不锈钢管基底的磨损率(80×10^-7mm^3/(N·m))。结论将HiPIMS电源应用于PECVD技术在304不锈钢内壁沉积的DLC涂层具有较高的硬度,与304不锈钢管内壁具有较高的结合力,同时具有优异的耐腐蚀性能和耐磨性以及良好的润滑作用。HiPIMS电源应用于PECVD技术有望应用更长管道内壁DLC涂层的制备。The work aims to deposit DLC coatings on inner wall of 304SS tube by PECVD technology with HiPIMS power supply,so as to improve the mechanical properties and corrosion and wear resistance of the tube.HiPIMS power supply was applied to PECVD technology to generate high density plasma deposited DLC coatings inside 304SS tube by hollow cathode effect.The Raman spectra,SEM and EDS were used to characterize the structure and composition of DLC coatings.The hardness,adhesion force,corrosion resistance,tribology and wear resistance of DLC coatings were assessed by nano-indentation test,scratch test,potentiodynamic polarization test and friction and wear test,respectively.By applying HiPIMS power supply in PECVD technology,DLC coatings could be deposited on inner wall of 304SS tube.The thickness of DLC coatings increased from 5.60 μm to 10.26 μm,the hardness could reach 10~15 GPa,and the adhesion force (Lc2) between DLC coatings and inner wall of 304SS tube was more than 7 N.Furthermore,the corrosion current density of DLC coatings was smaller than that on bottom of bare 304SS tube about one order of magnitude and the corrosion potential shifted positively.DLC coatings had good lubrication effects with friction coefficients of (0.06~0.18) and wear rates of 2.5×10^-7~8.1×10^-7 mm^3/(N·m) which were lower than the wear rate of bare 304SS tube (80×10^-7 mm^3/(N·m)).DLC coatings with higher hardness can be successfully deposited on the inner wall of 304SS tube by PECVD technology with HiPIMS power supply and the as-coated DLC coatings possess higher adhesion force with inner wall of 304SS tube and excellent corrosion and wear resistance as well as good lubrication.In addition,PECVD technology with HiPIMS power supply is expected to be used for the deposition of DLC coatings on the inner wall of longer pipe.

关 键 词：高功率脉冲磁控溅射电源 空心阴极等离子体增强化学气相沉积 管内壁 DLC涂层 耐蚀性 耐磨性 均匀性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]