光学元件缺陷在线检测光学系统设计  

Optical system design for on-line defects detection of optical components

作　　者：张文学 王继红[1,2,3] 任戈 ZHANG Wenxue;WANG Jihong;REN Ge(Key Laboratory of Optical Engineering,CAS,Chengdu 610209,China;Institute of Optics and Electronics, CAS,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光束控制重点实验室,四川成都610209 [2]中国科学院光电技术研究所,四川成都610209 [3]中国科学院大学,北京100049

出　　处：《应用光学》2019年第5期779-785,共7页Journal of Applied Optics

基　　金：脉冲功率激光技术国家重点实验室开放基金资助项目(SKL2018KF05)

摘　　要：为实现对望远镜系统中光学元件表面缺陷在线检测,介绍了一种用于光学元件表面缺陷检测的变焦距成像光学系统,采用机械变焦形式实现变焦功能。根据望远镜系统技术要求计算出变焦距系统的关键参数,通过Zemax软件设计并优化得到最终结果,整个变焦系统的设计实现了90mm^540mm的6倍变焦,在变焦过程中F数和像面位置保持不变,变焦系统总长为553.1mm。从调制传递函数(MTF)、点列图2个方面分析了系统的成像质量,系统在各焦距处的MTF值在100lp/mm处均大于0.3,物方分辨率优于0.055mm,在不同焦距处弥散斑半径均方根值均控制在艾里斑半径范围内。最后对系统环境适应性进行了分析,讨论了工作温度范围为-10℃~40℃时对系统成像质量的影响,并给出了温度补偿方案。实验结果表明,补偿后的系统成像质量良好,满足实际需求。In order to realize the on-line detection of the surface defects of optical elements in the telescope system,a zoom imaging optical system for the detection of the surface defects of optical elements was introduced.Firstly,some key parameters of the zoom system were calculated according to the technical requirements of the telescope system.Then,the final result was obtained after design and optimization with Zemax software.Thewhole zoom system achieves a 6-fold continuous zoom with a focal length of 90 mm^540 mm.During the zoom process,the F number and image surface position of the system remain unchanged,and the design results show that the total length of the zoom system is 553.1mm.Finally,we analyzed the imaging quality of the system from modulation transfer function(MTF)and point sequence diagram.The MTF value of the system at each focal length is greater than 0.3 in 100 lp/mm,and the object resolution is better than 0.055 mm.The root mean square value of the diffusion spot radius of the system at different focal lengths is controlled within the airy spot radius.In addition,we also analyzed the environmental adaptability of the system,studiedthe imaging quality of the system in the temperature range of-10℃~40℃,and gave the temperature compensation scheme.The imaging quality of the whole system is good and can meet the actual demandafter compensation.

关 键 词：光学元件 在线检测 变焦距光学系统 环境适应性分析 

分 类 号：TN202[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]