Efficient molecular model for squeeze-film damping in rarefied air  

作　　者：Cun-Hao Lu Pu Li Yu-Ming Fang 陆存豪;李普;方玉明(School of Mechanical Engineering,Southeast University,Nanjing 211100,China;College of Electronic Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 211100,China)

机构地区：[1]School of Mechanical Engineering,Southeast University,Nanjing 211100,China [2]College of Electronic Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 211100,China

出　　处：《Chinese Physics B》2019年第9期367-372,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant No.51375091)

摘　　要：Based on the energy transfer model(ETM) proposed by Bao et al.and the Monte Carlo(MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model(MC-S) for squeeze-film damping(SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap.Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM.Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed.It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high.At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.Based on the energy transfer model(ETM) proposed by Bao et al.and the Monte Carlo(MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model(MC-S) for squeeze-film damping(SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap.Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM.Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed.It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high.At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.

关 键 词：micro-electro-mechanical system(MEMS) squeeze-film AIR DAMPING rarefied AIR MOLECULAR model 

分 类 号：O4[理学—物理]