17-4PH钢表面Ti/TiN多层复合薄膜的研究  

Study on Ti/TiN Foil Laminated Film on 17-4PH Steel Surface

作　　者：于耀华 王彦峰[2] 吴伟建 Yu Yaohua;Wang Yanfeng;Wu Weijian

机构地区：[1]上海第一机床厂有限公司,上海201308 [2]西北有色金属研究院,西安710055

出　　处：《上海电气技术》2019年第3期51-60,共10页Journal of Shanghai Electric Technology

摘　　要：对17-4PH钢表面Ti/TiN多层复合薄膜进行了研究,应用电弧离子镀技术分析了不同Ti层与TiN层厚度比值和不同复合层数对表面形貌、断面形貌、成分、显微硬度、相结构、致密性、厚度均匀性、耐磨性、结合力等涂层性能的影响。通过研究确认,在Ti单层沉积3min、TiN单层沉积17min条件下制备的Ti/TiN六层复合薄膜具有极好的力学性能,可以使基体材料的表面硬度提高5倍以上,并使膜基结合力达到56N以上。Ti/TiN foil laminated film on 17-4PH steel surface was investigated.The influence of the thickness ratio of different Ti layer to TiN layer and the number of different composite layers on coating properties such as surface topography, section pattern, composition, microhardness, phase structure, compactness, thickness uniformity, wearability and bonding force were analyzed by arc ion plating technology.It is confirmed by research that the Ti/TiN six-layer laminated film prepared by Ti monolayer deposition for 3 min and TiN monolayer deposition for 17 min has excellent mechanical properties.The surface hardness of the base material can be increased more than 5 times and the bonding force of film base can come to 56 N or more.

关 键 词：钢 钛 氮化钛 复合薄膜 研究 

分 类 号：TM241[一般工业技术—材料科学与工程]