基于虚拟参考面的相位高度映射方法  

Phase-height mapping method based on a virtual reference plane

作　　者：刘柠溢 刘元坤[1] 李云 李剑[2] 王旭[2] LIU Ning-yi;LIU Yuanrkun;LI Yun;LI jian;WANG Xu(Opto-Electronic Department ,Sichuan University Chengdu,Sichuan 610065,china;Institute of Fluid Physics,CAEP ,621999, china)

机构地区：[1]四川大学电子信息学院光电科学技术系,成都610065 [2]中国工程物理研究院流体物理研究所,绵阳621999

出　　处：《光电子．激光》2019年第7期712-718,共7页Journal of Optoelectronics·Laser

基　　金：国家重大科学仪器设备开发专项[2013YQ490879];国家自然科学基金(61675141)资助项目

摘　　要：在相位测量轮廓术中,相位高度映射是通过对若干已知平面的高度和相位来完成系统标定。其中四平面法所需数据量最少,但是单向相位高度映射在进行高度重建时,相位差越接近于0,则重建高度误差越大。为此提出一种基于虚拟参考面的相位高度映射法,即通过在原四平面基础上增加一个预设高度的虚拟平面,再拟合得到其相位分布,进而计算出适合于整个标定空间的系数表a、b、c,从而显著提高物体三维重建精度。实验结果证明了该方法的可以有效地减小映射高度误差,测得单向相位高度映射法物体重建相对误差低于4.76×10^-2 mm,虚拟参考平面相位高度映射法物体重建相对误差低于7×10^-3 mm,平面测量均差低于5×10^-3 mm。In the phase measurement profilometry,the phase-height mapping is to calibrate the system by the height and phase of several known planes.The four planes method needs the least amount of data,but the height reconstruction of dual-direction mapping method,the more the phase difference is close to 0,the greater the reconstruction height error is.In this article,in order to solve the above problems,a phase-height mapping method based on virtual reference plane is proposed,that is,by adding a virtual plane with preset height on the basis of the original four planes,the phase distribution of the plane can be obtained by fitting.Then the coefficient tables a、 b、c which are suitable for the whole calibration space are calculated.Therefore,this problem is solved and the accuracy of 3D shape reconstruction is greatly improved.The experimental results show that this method can effectively reduce the mapping height error.The relative error of the single-direction phase-height mapping method is less than 4.76×10^-2 mm.The relative error of the virtual reference plane phase height mapping method is less than 7×10^-3 mm,and the mean deviation of the plane measurement is less than 5×10^-3 mm.

关 键 词：相位高度映射 虚拟平面 三维重建 相位测量轮廓术 

分 类 号：O438[机械工程—光学工程]