离子束抛光研究进展  

Research progress on ion beam polishing

作　　者：王喜社[1] 李新凯[1] 谭袁迅 邓亦峭 WANG Xishe;LI Xinkai;TAN Yuanxun;DENG Yixiao(National Demonstration Center for Experimental Education of Mechanical and Electrical Engineering Training,Guilin University of Electronic Technology,Guilin 541004,CHN)

机构地区：[1]桂林电子科技大学机电综合工程训练国家级实验教学示范中心

出　　处：《制造技术与机床》2019年第10期28-31,共4页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金项目:基于扫描电子束的新型抛光技术机理和数学建模研究(51665009)

摘　　要：介绍了一种新型材料表面处理技术——离子束抛光,阐述了离子束表面抛光的基本原理及国内外离子束抛光的发展。介绍了离子束抛光作为一种新型表面抛光方法在研究领域中的应用,并综述了近年来离子束抛光研究的发展动态,简述了国内外相关领域的主要研究成果及取得的进展,对离子束抛光技术做出了展望。In this paper,a new material surface treatment technology is introduced which is ion beam figuring,expounds the basic principle of ion beam figuring and the development of ion beam figuring at home and abroad.Ion beam figuring is introduced as a new type of surface polishing method application in the field of research,and ion beam figuring research developments in recent years were reviewed,summarized the domestic and foreign relevant research results and progress in the field of,ion beam figuring technology has made the prospects.

关 键 词：离子束 抛光 材料表面处理 发展 

分 类 号：TN29[电子电信—物理电子学]