辉光放电反应腔内带电粒子瞬态物理特性仿真研究  

Simulation of the Transient Physical Characteristics of Charged Particles in a Glow Discharge Chamber

作　　者：钱杨 冯音琦[1] 宋晓鹏 黄民双[1] QIAN Yang;FENG Yinqi;SONG Xiaopeng;HUANG Minshuang(Opto-Mechatronic Equipment Technology Beijing Area Major Laboratory,Beijing Institute of Petrochemical Technology,Beijing 102617,China;School of Mechanical Engineering,Beijing University of Chemical Technology,Beijing 100029,China)

机构地区：[1]北京石油化工学院,北京市光机电重点实验室,北京102617 [2]北京化工大学机械工程学院,北京100029

出　　处：《北京石油化工学院学报》2019年第3期71-78,共8页Journal of Beijing Institute of Petrochemical Technology

基　　金：北京市自然科学基金资助项目(3172012)

摘　　要：建立了辉光放电圆柱型直流反应腔内等离子体的二维流体数学模型,利用COMSOL软件的有限元方法求解相应的数学方程,模拟圆柱形直流反应腔内氩气辉光放电生成的等离子体的瞬态物理特性,获得反应腔内电子密度、离子密度、电势、电子温度等物理量随时间空间的分布情况;研究电源电压和潘宁电离反应率对反应腔内等离子体浓度的影响,探究了腔内放电击穿以及从正常辉光放电到异常辉光放电的发展过程。仿真实验结果表明,该数学模型清楚地模拟出腔内放电击穿瞬间带电粒子密度的变化规律和正常辉光放电生成等离子体的阴极位降区、负辉区、法拉第暗区以及正柱区的特性;适当减小回路镇流电阻,根据各物理量随时间空间的分布情况,还可判断出正常辉光向异常辉光的转化;微量杂质的提高所引起的潘宁电离效应的有效增加,使反应腔内电子温度的最高下降幅度达到19%。A mathematical two-dimensional fluid model of plasma in a cylindrical reaction chamber is established.Its mathematical equations are calculated using a finite element method with COMSOL software in order to simulate transient physical characteristics of glow discharge plasma of argon gas in the cylindrical reaction chamber.Distributions of electron density,ion density,electric potential and electron temperature with time and space in the reaction chamber are obtained.Effects of power supply voltages and Penning ionization rates on plasma s concentrations in the reaction chamber are investigated.Electric discharge breakdown process and the development from normal glow discharge plasma to abnormal glow discharge plasma are explored.Simulated experimental results show that electron density changing in the discharge breakdown process in the chamber and characteristics of cathode fall region,negative glow region,Faraday dark region and positive column region generated in normal glow discharge process in the chamber are all simulated clearly using this mathematical model.When properly reducing the resistant value of a current resistor,a transformation from a normal glow process to an abnormal glow process could be determined based on distributions with time and space of all kinds of physical values.When ionization rates of Penning in the chamber are increased effectively,gas electron temperature in the chamber could be increased 19%in maximum.

关 键 词：辉光放电 二维流体模型 带电粒子物理特性 潘宁电离率 

分 类 号：O539[理学—等离子体物理]