Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector  

作　　者：ZENG Kun DUAN Xiao-feng HUANG Yong-qing LIU Kai REN Xiao-min 曾昆;段晓峰;黄永清;刘凯;任晓敏(State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications)

机构地区：[1]State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications

出　　处：《Optoelectronics Letters》2019年第4期250-254,共5页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.61674018,61574019 and 61674020);the Specialized Research Fund for the Doctoral Program of Higher Education of China(No.20130005130001);the Beijing Municipality Natural Science Foundation(No.4132069)

摘　　要：Novel construction of a resonant-cavity-enhanced photodetector(RCE-PD) with monolithic high-contrast grating(HCG)is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure,HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration.During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.

关 键 词：Novel construction resonant-cavity-enhanced photodetector(RCE-PD) HIGH-CONTRAST grating(HCG) 

分 类 号：TN[电子电信]