三氯化硼的制备和纯化研究综述  

Advance Research of the Preparation and Purification of Boron Trichloride

作　　者：马建修 王维佳 李广新 靖宇 MA Jianxiu;WANG Weijia;LI Guangxin;JING Yu(Linggas (Tianjin) Limited,Tianjin 301714,China;Linggas Materials Tianjin Limited,Tianjin 300457,China)

机构地区：[1]绿菱电子材料(天津)有限公司,天津301714 [2]天津绿菱气体有限公司,天津300457

出　　处：《低温与特气》2019年第5期20-24,共5页Low Temperature and Specialty Gases

基　　金：绿菱作为联合体成员之一,承担中芯国际牵头主持的2018年工业转型升级资金(部门预算)——国家新材料生产应用示范平台建设项目之课题3“集成电路工艺用材料生产应用示范平台”(项目编号:TC180A6MR)

摘　　要：三氯化硼在精细化学品、航空航天、材料加工及半导体领域具有不可替代的作用。三氯化硼在大规模集成电路金属铝层刻蚀制程中起到重要作用,其纯度与质量要求较为严格。详尽地将三氯化硼的制备和纯化方法进行了归纳与总结,并追踪了近几年的工艺发展,认为在现有传统三氯化硼生产工艺基础上进行改进,降低能耗、提高合成选择性、提高安全性能与提高传质效率是三氯化硼生产的发展趋势。期待为国内高纯三氯化硼的研发和生产提供借鉴作用,从根本上解决高纯三氯化硼依赖进口、受制于人的被动局面。Boron trichloride has an irreplaceable role in fine chemicals,aerospace,materials processing and semiconductors.In particular,boron trichloride,an important role in the process of metal aluminum layer etching of large-scale integrated circuit,has strict requirements on purity and quality.In this paper,the preparation and purification methods of boron trichloride are summarized in detail,and the process development in recent years is traced.The authors believe that the existing traditional manufacture process of boron trichloride can be improved.Decreasing the energy consumption,increasing the synthesis selectivity,increasing safety performance and increasing mass transfer efficiency are the development trend of boron trichloride manufacture.This paper is expected to provide reference for the research and development for domestic high-purity boron trichloride,in order to solve the problems of the import and heteronomy.

关 键 词：三氯化硼 合成 纯化 

分 类 号：TQ117[化学工程—无机化工]