直接吸收光谱多普勒展宽测温中的激光功率稳定研究  

Research on laser power stabilization in doppler broadening temperature measurement

作　　者：刘祎凡 潘奕捷 王柏淞 王贺 廖文汉[1,3] 刘超 屈继峰[1] LIU Yifan;PAN Yijie;WANG Bosong;WANG He;LIAO Wenhan;LIU Chao;QU Jifeng(National Institute of Metrology Center for Advanced Measurement Science,Beijing 100029,China;Beijing Information Science &Technology University School of Instrument Science and Photoelectric Engineering,Beijing 100192,China;China Jiliang University College of Metrology & Measurement Engineering,Hangzhou 310018,China;Beijing Institute of Technology School of Optoelectronics Target Simulation Laboratory,Beijing 100081,China)

机构地区：[1]中国计量科学研究院前沿计量科学中心,北京100029 [2]北京信息科技大学仪器科学与光电工程学院,北京100192 [3]中国计量大学计量测试工程学院,杭州310018 [4]北京理工大学光电学院目标仿真实验室,北京100081

出　　处：《光学技术》2019年第5期547-551,共5页Optical Technique

基　　金：国家重点研发项目资助(2017YFF0206102);北京信息科技大学2018-2019年度实培计划项目资助

摘　　要：国际单位制中温度基本单位"开尔文"的重新定义致使温度测量逐步实现国际协议温度标准与热力学温度标准的融合。基于铯133原子直接吸收光谱的多普勒展宽测温可实现芯片尺度室温范围的热力学温度测量,但其拟合残差及不确定度受限于测量激光的功率稳定性,针对此问题,提出在外腔扫描式激光器的频率稳定基础上,利用声光调制器以及高速比例-积分控制器构建闭环功率稳定系统,提升并评价了测量激光光束的功率稳定性。实验证明测量光束在10mW微弱功率条件下相对噪声强度达到-126dB/Hz,30min内功率稳定性达到0.008%。上述激光功率稳定性有效减小了拟合残差以及不确定度,为实现芯片尺度、在线免标定的热力学温度传感奠定基础。The redefinition of SI and the corresponding the unit of temperature, the Kelvin, make the International Temperature Scale 1990 gradually merge with the expected Thermodynamic Temperature Scale. The Cesium 133 atomic direct laser absorption based Doppler broadening thermometry could realize chip-scaled room-ranged temperature measurement.While its fitting residuals and measurement uncertainty were influenced by the stability of probing laser.This research used an acoustic-optical modulator and a high speed proportional-integral controller to stabilize laser beam.The results showed that relative intensity noise within 1 KHz frequency band reached-126 dB/Hz,and the relative power stabilization achieved 0.008%for 30 minutes.This results effectively reduced the fitting residual and the measurement uncertainty,which made a progress in implementing the chip-scale,calibration free,thermodynamic temperature sensor.

关 键 词：多普勒展宽测温 热力学温度 功率稳定 相对强度噪声 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]