基于等效积分的去除函数误差修正能力分析  

Analysis of error correction ability of removal function based on equivalent integral

作　　者：郑楠[1] 邓文辉[1] 陈贤华[1] ZHENG Nan;DENG Wenhui;CHEN Xianhua(Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang Sichuan 621999,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心

出　　处：《太赫兹科学与电子信息学报》2019年第5期877-884,共8页Journal of Terahertz Science and Electronic Information Technology

基　　金：中物院非装备科研计划基金资助项目(TCGH0804)

摘　　要：针对计算机光学表面成形技术的去除理论中关于材料去除量及去除函数误差修正能力问题,基于等效去除积分法,对高斯型、三角形、梯形、脉冲随机复合型等多种不同形态的去除函数修正能力进行研究,通过频域分析去除函数的误差修正能力,获得调制参数与去除函数修正能力的关联曲线,建立基于等效去除积分法的去除函数截止修正能力评价模型,为去除函数误差修正的调制及去除函数修正能力评价提供依据,从而在大口径光学元件的超高精确度加工中,提高超光滑光学元件表面的质量。Aiming at the problem of removal function correction ability in removal theory of Computer Controlled Optical Surfacing(CCOS), based on the equivalent removal integral method, the correction ability of Gaussian type, triangle type, trapezoid type, pulse random compound type and other removal functions is studied. The correlation curve between the modulation parameters and the correction ability of the removal function is obtained by analyzing the error correction ability of the removal function in frequency domain. An evaluation model of cutoff correction ability of removal function based on equivalent removal integral method is established, which provides a theoretical basis for the adjustment of removal function error correction and the evaluation of removal function correction ability, so as to improve the surface quality of ultra-smooth optical elements in ultra-high precision machining of large aperture optical elements.

关 键 词：计算机控制光学表面成形 超高精确度光学元件制造 去除函数 误差修正能力 频谱变换 

分 类 号：TN911.7[电子电信—通信与信息系统]