氩气空心阴极放电复杂动力学过程的模拟研究  

Simulation on complex dynamics of hollow cathode discharge in argon

作　　者：何寿杰[1] 周佳 渠宇霄 张宝铭 张雅 李庆[1] He Shou-Jie;Zhou Jia;Qu Yu-Xiao;Zhang Bao-Ming;Zhang Ya;Li Qing(Hebei Key Laboratory of Optic-electronic Information and Materials,College of Physics Science and Technology,Hebei University,Baoding 071002,China)

机构地区：[1]河北大学物理科学与技术学院河北省光电信息材料重点实验室

出　　处：《物理学报》2019年第21期209-218,共10页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:11205046,51777051);河北省自然科学基金(批准号:A2016201025);河北大学研究生创新资助项目(批准号:hbu2019ss078)资助的课题~~

摘　　要：利用流体模型模拟研究了氩气空心阴极放电的动力学过程.数值模型考虑了直接基态电离、基态激发、分步电离、潘宁电离、解激发、两体碰撞、三体碰撞、辐射跃迁、弹性碰撞和复合反应等31个反应过程.计算得到了电子密度, Ar+密度,激发态氩原子Ar4s、Ar4p、Ar3d能级的密度,电势和电场强度等的分布特性.同时模拟得到了不同反应机制对电子、激发态氩原子Ar4s、Ar4p的产生和消耗机理的影响.结果表明,在本模拟条件下存在明显的空心阴极效应,激发态氩原子Ar4s的密度大大高于电子密度.激发态氩原子Ar4s参与的潘宁电离2Ar4s→Ar++Ar+e和分步电离对新电子的产生和电子能量的平衡具有重要贡献,特别是以往模拟中通常被忽略的产生Ar2+的潘宁电离反应2Ar4s→Ar2++e同样对电子的产生具有重要影响.激发态氩原子密度的空间分布是放电过程中各种粒子生成和消耗相互平衡的结果.本模型所包含的反应中,激发态氩原子Ar4p退激发到Ar4s能级的辐射反应Ar4p→Ar4s+hn是Ar4s能级产生的主要来源,同时也是激发态氩原子Ar4p消耗的主要途径.电子碰撞Ar4s激发到Ar4p能级的反应Ar4s+e→Ar4p+e是激发态氩原子Ar4s消耗的主要途径,也是产生激发态氩原子Ar4p的主要途径.模拟结果同时表明,利用激发态氩原子Ar4p能级的分布特性能够更好地反映空心阴极放电中的光学特性.In this paper,the dynamics of hollow cathode discharge in argon is simulated by fluid model.In the numerical model considered are 31 reaction processes,including direct ground state ionization,ground state excitation,stepwise ionization,Penning ionization,de-excitation,two-body collision,three-body collision,radiation transition,elastic collision,and electron-ion recombination reaction.The electron density,Ar^+density,Ar^4s,Ar^4p,Ar^3d particle density,electric potential and electric field intensity are calculated.At the same time,the contributions of different reaction mechanisms for the generation and consumption of electron,Ar4s and Ar4p are simulated.The results indicate that hollow cathode effect exists in the discharge,and the Ar4s density is much higher than electron density.The penning ionization 2Ar^4s→Ar^++Ar^++e and stepwise ionization involving Ar^4s make important contributions to the generation of new electrons and the balance of electron energy.In particular,the penning ionization reaction 2Ar^4s→Ar2^++e,which is generally ignored in previous simulation,also has an significant influence on electron generation.The spatial distribution of excited state argon atomic density is the result of the balance between the formation and consumption of various particles during discharge.Radiation reaction Ar^4p→Ar4s^+hn is the main source of Ar4s generation and the main way to consume Ar4p.Ar^4s+e→Ar^4p+e is the main way of Ar4s consumption and Ar4p production.The simulation results also show that the Ar4p density distribution can better reflect the optical characteristics in the hollow cathode discharge.

关 键 词：空心阴极放电 流体模型 激发态原子 反应机制 

分 类 号：O462[理学—电子物理学]