高质量纳米ZnO薄膜的制备技术及应用现状  

Production and Application of High Quality Nano-ZnO Thin Films

作　　者：倪佳苗 沈红成 NI Jia-miao;SHEN Hong-cheng(College of Architecture and Materials Engineering,Hubei University of Education,Wuhan 430205,China;Institute of Materials Research and Engineering,Hubei University of Education,Wuhan 430205,China)

机构地区：[1]湖北第二师范学院建筑与材料工程学院,武汉430205 [2]湖北第二师范学院材料科学研究院,武汉430205

出　　处：《湖北第二师范学院学报》2019年第8期32-36,共5页Journal of Hubei University of Education

基　　金：湖北省自然科学面上基金(2014CFB563)

摘　　要：纳米ZnO具有许多优异的光学性质和物理化学特性而受到广大科研者的广泛关注,而高质量纳米ZnO薄膜具有非常广泛的用途和应用前景。根据最新国内外研究现状,本文重点研究高质量纳米ZnO薄膜的制备方法:溶胶-凝胶法、化学气相沉积法、分子束外延法、激光脉冲沉积法和溅射法;并比较几种制备方法的优缺点,分析高质量纳米ZnO薄膜在太阳能电池、气敏元件、压电元件和压敏元件等方面的应用。Nano-ZnO has many optical properties and physicochemical properties,which are of great interest to researchers.High-quality nano-ZnO films have a very wide range of applications and good application prospects.Based on the current research status at home and abroad,production and application of high-quality nano-ZnO thin films are researched and compared.The research is mainly on production methods of high-quality nano-ZnO thin films,which are sol-gel production,chemical vapor deposition and molecular beam epitaxy,laser pulse deposition and sputtering.Their advantages and disadvantages are compared.The paper also analyses the application of high-quality nano-ZnO thin films in solar cells,gas sensors,piezoelectric elements and pressure sensitive components.

关 键 词：纳米ZNO薄膜 制备方法 应用 发展 

分 类 号：TB43[一般工业技术]