柔性压力传感器温度漂移补偿结构设计  

A Temperature Drift Compensation Structure Design of Flexible Pressure Sensor

作　　者：聂萌[1] 陈佳琦 徐峰[1] NIE Meng;CHEN Jiaqi;XU Feng(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学MEMS教育部重点实验室

出　　处：《传感技术学报》2019年第10期1443-1446,1466,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(11774051,61574034,61474023);中央高校基本科研业务费专项资金项目(2242019k1G012);中国博士后基金项目(2014M550259,2015T80480)

摘　　要：温度补偿是对微传感器的性能进行优化与稳定的必要技术方案。提出了一种适用于柔性压力传感器的温度漂移补偿方法及结构,选用高热膨胀系数的聚二甲基硅氧烷(PDMS)与硅橡胶(EcoFlex)作为柔性衬底,结合基底表面微结构设计进行温度补偿。由测试结果分析,未补偿前传感器的TCR系数为-0.57%/K,在EcoFlex、PDMS、表面具有微结构的EcoFlex、以及表面具有微结构的PDMS四种基底上TCR系数分别为-0.42%/K,-0.37%/K,-0.24%/K,-0.22%/K,可知温度漂移得到有效补偿。本研究方法为柔性压阻式传感器的温漂性能优化提供了有益的借鉴作用。Piezoresistive sensors are inevitably affected by temperature drift during their working process,which makes their performance decline.In order to improve the performance of flexible piezoresistive sensors,it is necessary to compensate their temperature drift.A principle of temperature drift compensation applied to flexible pressure sensor is proposed,and the effect of temperature compensation is improved by structural design.The high thermal expansion coefficient polydimethylsiloxane(PDMS)and Eco Flex silicone rubber with surface microstructures were selected as flexible substrates to compensate the temperature drift.The TCR of MWCNTS piezoresistive sensor before compensation is -0.57%/K;while the TCRs of MWCNTS on substrates of Eco Flex,PDMS,surface microstructure Eco Flex,and surface microstructure PDMS are -0.42%/K,-0.37%/K,-0.24%/K,and -0.22%/K,respectively.As a result,the temperature drift of MWCNTS is effectively compensated.The present work provides a paradigm of optimizing the temperature drift of flexible piezoresistive sensors.

关 键 词：柔性电子 压阻传感器 温度漂移 热膨胀系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]