电感变化率对涡流传感器性能影响的仿真研究  

Simulation Study on the Effect of Inductance Change Rate on Performance of Eddy Current Sensor

作　　者：荣锋[1,2] 王一 郭翠娟 闫淑霞[1] RONG Feng;WANG Yi;GUO Cuijuan;YAN Shuxia(School of Electronics and Information Engineering,Tianjin Polytechnic University,Tianjin 300387,China;Tianjin Key Laboratory of Optoelectronic Detection Technology and System,Tianjin 300387,China)

机构地区：[1]天津工业大学电子与信息工程学院,天津300387 [2]天津市光电检测技术与系统重点实验室,天津300387

出　　处：《传感技术学报》2019年第10期1467-1472,共6页Chinese Journal of Sensors and Actuators

基　　金：天津市科委青年基金项目(15JCQNJC42100);天津市科技特派员项目(16JCTPJC48100,16JCTPJC47200)

摘　　要：为了提高涡流传感器的电感灵敏度和热稳定性,研究了探头线圈的结构、激励频率和温度对线圈电感变化率的影响。首先通过COMSOL Multiphysics仿真软件构建稳态物理模型并加入瞬态温度模块,通过参数化扫描仿真,验证该模型的合理性。其次在稳态恒温实验条件下对线圈内外半径、厚度、匝数进行仿真,得到导线直径不超过40μm、内半径0.1mm^0.5mm、外半径2.5mm的60匝单层平面线圈的电感灵敏度和测量分辨率最佳。最后在瞬态变温实验条件下得到激励频率900kHz时可以最大程度的提高传感器热稳定性和电感灵敏度,减小温度引起的误差。In order to improve the inductance sensitivity and thermal stability of the eddy current sensor,the influence of probe coil structure,excitation frequency and temperature on the inductance change rate of the coil is studied.Firstly,the steady-state physical model is built by COMSOL Multiphysics simulation software and the transient temperature module is added.The rationality of the model is verified by parametric scanning simulation.Secondly,the inner and outer radius,thickness and turns of the coil are simulated under the condition of steady-state constant temperature experiment,the results show that the inductance sensitivity and measurement resolution of 60-turn single-layer planar coil with wire diameter not exceeding 40 μm,inner radius 0.1 mm^0.5 mm and outer radius 2.5 mm are the best.Finally,the thermal stability and inductance sensitivity of the sensor can be improved to the greatest extent and the error caused by temperature can be reduced when the excitation frequency is 900 kHz under the condition of transient temperature change experiment.

关 键 词：涡流传感器 电感变化率 COMSOL仿真 灵敏度 热稳定性 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]