Optimization Design of Silicon Micro - capacitive Accelerometer with PWM Technique  

作　　者：WUYing JIANGYong－qing 等 

机构地区：[1]Optoelectr.Eng.College,ChongqingUniversity,Chongqing400044,CHN [2]Optoelectr.Eng.College,ChongqingUniver

出　　处：《Semiconductor Photonics and Technology》1999年第4期193-197,228,共6页半导体光子学与技术（英文版）

摘　　要：The property of silicon micro-capacitive accelerometer is analyzed and discussed by establishing the model of the sensor,to lay a basis for optimization design of sensor system structure. Discussed issues include the static modeling and dynamic behavior of the two commonly used structures,i.e., double-cantilever supported and four-beam supported structures, and also the measurement range of these devices.The property of silicon micro-capacitive accelerometer is analyzed and discussed by establishing the model of the sensor,to lay a basis for optimization design of sensor system structure. Discussed issues include the static modeling and dynamic behavior of the two commonly used structures,i.e., double-cantilever supported and four-beam supported structures, and also the measurement range of these devices.

关 键 词：Capacitive Accelerometer PWM Modulation Silicon Micromachine 

分 类 号：TH824.4[机械工程—仪器科学与技术]