Synthesis of Carbon Nanotubes by MWPCVD at Low Temperature  

作　　者：王升高 汪建华 王传新 马志彬 满卫东 

机构地区：[1]Institute of Plasma Physics, Chinese Academy of Science. Hefei 230031, China, Department of Materials Science and Engineering, Wuhan Institute of Chemical Technology, Wuhan 430073, China [2]Department of Materials Science and Engineering, Wuhan Institute of Chemical Technology, Wuhan 430073, China

出　　处：《Plasma Science and Technology》2002年第1期1135-1140,共6页等离子体科学和技术（英文版）

摘　　要：Growth of carbon nanotubes (CNTs) at low temperature is very important to the ap- plications of nanotubes. In this paper, under the catalytic effect of cobalt nanoparticles supported by SiO2, CNTs were synthesized by microwave plasma chemical vapor deposition (MWPCVD) below 500°C. lt demonstrates that MWPCVD can be a very efficient process for the synthesis of CNTs at low temperature.Growth of carbon nanotubes (CNTs) at low temperature is very important to the ap- plications of nanotubes. In this paper, under the catalytic effect of cobalt nanoparticles supported by SiO2, CNTs were synthesized by microwave plasma chemical vapor deposition (MWPCVD) below 500°C. lt demonstrates that MWPCVD can be a very efficient process for the synthesis of CNTs at low temperature.

关 键 词：CNTS Synthesis of Carbon Nanotubes by MWPCVD at Low Temperature 

分 类 号：O488[理学—固体物理] TN304.055[理学—物理]