掺杂CeO2对流延成型制备的氮化铝陶瓷性能的影响  

Effect of CeO2 Doping on Properties of Aluminium Nitride Ceramics Prepared by Tape Casting

作　　者：桂如峰 邹阳[1] 李晨辉[1] 刘江安 贺智勇 史玉升[1] GUI Rufeng;ZOU Yang;LI Chenhui;LIU Jiang′an;HE Zhiyong;SHI Yusheng(State Key Laboratory of Material Processing and Die&Mould Technology,Huazhong University of Science and Technology,Wuhan 430074,China;China Iron&Steel Research Institute Group,Beijing 100081,China)

机构地区：[1]华中科技大学材料成形与模具技术国家重点实验室,湖北武汉430074 [2]中国钢研科技集团有限公司,北京100081

出　　处：《化学与生物工程》2019年第8期6-11,共6页Chemistry & Bioengineering

基　　金：国家科技重大专项02专项(2013ZX02104001);国家自然科学基金面上项目(51372093);湖北省博士后科技活动项目(0106110094)

摘　　要：以氮化铝(AlN)粉末为原料,掺杂10%~15%的CeO2,采用流延成型工艺制备AlN陶瓷生坯;排胶后在氮气气氛下1775℃保温4h,采用常压烧结制备静电卡盘用AlN陶瓷(体积电阻率为10^11~10^9Ω·cm)。研究了排胶升温速率对生坯的表面形貌以及CeO2掺杂量对烧结体的电学与热学性能、微观组织和物相组成的影响。结果表明:在200~450℃之间升温速率为0.2℃·min^-1的条件下排胶后,AlN陶瓷生坯形貌完整、无裂纹和翘曲;在CeO2掺杂量为14%时,AlN陶瓷烧结体可以获得较优的综合性能,致密度96.82%,热导率99W·m^-1·K^-1,体积电阻率4.75×10^10Ω·cm。显微结构分析表明,随着CeO2掺杂量的增加,形成的铈铝酸盐晶间相逐渐由点状分布变为连续分布,有利于导电通路的形成,从而降低AlN陶瓷烧结体体积电阻率。Using aluminium nitride(AlN)powers as raw material and doping 10%-15%CeO2,we prepared AlN ceramics green bodies by tape casting process.Then,the AlN ceramics green bodies were heated at 1 775℃for 4 h in nitrogen atmosphere after binder removal.Moreover,we prepared AlN ceramics for electrostatic chuck with volume resistivity of 10^11-10^9Ω·cm by an atmospheric sintering method,and investigated the effects of heating rate of binder removal on the surface morphology of green body and CeO2 doping amount on the electrical and thermal properties,microstructure and phase composition of AlN sintered body.The results show that,after binder removal at 200-450℃with a heating rate of 0.2℃·min^-1,the morphology of AlN ceramics green body is complete,and there are no cracks and warping.When the CeO2 doping amount is 14%,the comprehensive properties of AlN ceramics sintered body reach the cptimum,namely,the relative density of 96.82%,the thermal conductivity of 99 W·m^-1·K-1,and the volume resistivity of 4.75×10^10Ω·cm.Microstructure analysis shows that,with the increase of CeO2 doping amount,the distribution of the cerium aluminate intergranular phase changes gradually from discontinuously to continuously,which is conducive to the formation of conductive paths,thus the volume resistivity of the AlN ceramics sintered body is decreased.

关 键 词：氮化铝(AlN)陶瓷 CeO2掺杂 氧化铈 流延成型 体积电阻率 

分 类 号：TQ174.75[化学工程—陶瓷工业] TN304[化学工程—硅酸盐工业]