基于集成解调芯片的电感式位移传感器  

Inductive displacement sensors based on the integrated demodulation chip

作　　者：刘亚婷 张剀[1] 徐旸[1] LIU Yating;ZHANG Kai;XU Yang(The Department of Engineering Physics,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学工程物理系

出　　处：《储能科学与技术》2019年第5期891-896,共6页Energy Storage Science and Technology

基　　金：国家重点研发计划(2018YFB0905500);国家自然科学基金(51775292)

摘　　要：非接触式的位移传感器作为磁轴承系统的重要组件,对系统的综合性能有着重要的影响。为寻找低成本、高集成度的电感式位移传感器解调方案,本文以集成同步解调芯片为核心,经硬件设计与制板,软件开发与调试,建立了电感式位移传感器的测试平台,完成了对集成同步解调方案的评估实验。实验结果表明,同步解调芯片的输出信号与转子位移的线性度不超过2%,灵敏度为3 V/mm,最小分辨率可达1μm,能够满足一般磁悬浮轴承系统的位移检测需求。As an important component of the high-speed active magnetic bearing(AMB)system,the non-contact displacement sensor has significant impacts on the overall performance of the system.The traditional inductive displacement sensor signal demodulation circuit which is composed of discrete devices,has a high cost and a large space occupation.In order to develop a low-cost,high-integrated demodulation design of inductive displacement sensor,taking the integrated synchronous demodulation chip as the core,this paper performed tasks including the hardware design and manufacturing,software development and debugging,built the test platform of the inductive displacement sensor and finished evaluation experiments for the integrated synchronous demodulation design.The experimental results showed that the linearity between the synchronous demodulation chip output signal and rotor displacement is less than 2%.It is also shown a sensitivity of 3 V/mm,and a minimum resolution of up to 1μm,which can meet the displacement detection requirements of general AMB systems.

关 键 词：主动磁轴承 电感式位移传感器 同步解调 ADA2200 

分 类 号：TM912.9[电气工程—电力电子与电力传动]