基于HTCC工艺的电化学NO2气体传感器设计与测试  

Design and test of electrochemical NO2 gas sensor based on HTCC technology

作　　者：秦浩 王洋洋[1] 杨永超 刘智敏 佟勇 徐海鑫 QIN Hao;WANG Yangyang;YANG Yongchao;LIU Zhimin;TONG Yong;XU Haixin(The 49th Research Institute,China Electronic Technology Group,Harbin 150001,China;College of Materials Science and Chemical Engineering,Harbin Engineering University,Harbin 150001,China;Military Representative Office of Army Air Force in Harbin,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司,第四十九研究所,黑龙江哈尔滨150001 [2]哈尔滨工程大学,材料科学与化学工程学院,黑龙江哈尔滨150001 [3]陆军航空兵军事代表局驻哈尔滨军事代表室,黑龙江哈尔滨150001

出　　处：《轻工学报》2019年第4期59-63,共5页Journal of Light Industry

摘　　要：采用高温共烧陶瓷(HTCC)工艺,以氧化锆陶瓷、导电金属浆料、室温离子液体为主要原料,制作了一种电化学NO 2气体传感器,并对该传感器电极的电化学性能、传感器的输出和响应特性等进行了研究.结果表明:实验所用室温离子液体1-丁基-3-甲基咪唑双三氟甲磺酰亚胺盐适合作为该电化学NO 2传感器的电解液,适宜的工作电压为1.2 V;该传感器的检测范围为0~0.010%(体积分数)时,精度为1.5%FS;该传感器的响应时间(τ90)为25 s,优于传统腔室类电化学气体传感器.An electrochemical NO 2 gas sensor was fabricated by using high temperature co-fired ceramic(HTCC)process with zirconia ceramics,conductive metal paste and room temperature ionic liquid as the main raw materials.The electrochemical performance of the sensor electrode and the output and response characteristics of the sensor were studied.The results showed that the room temperature ionic liquid 1-butyl-3-methylimidazolium bis-trifluoromethylsulfonyl imide salt used in the experiment was suitable as the electrolyte of the electrochemical NO 2 gas sensor,and the suitable working voltage was 1.2 V;when the detection range of the sensor was 0~0.010%(volume fraction),and the accuracy was 1.5%FS.The response time(τ90)of the sensor was 25 s,which was superior to the traditional chamber electrochemical gas sensor.

关 键 词：HTCC工艺 电化学NO2气体传感器 离子液体 响应特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]