分压力质谱计校准技术研究进展  

Research Progress on Calibration Technology of Partial Pressure Mass Spectrometer

作　　者：吴成耀 成永军[1] 孙雯君[1] 董猛[1] 冯天佑[1] 李海涛 WU Chengyao;CHENG Yongjun;SUN Wenjun;DONG Meng;FENG Tianyou;LI Haitao(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空与低温》2019年第4期222-230,共9页Vacuum and Cryogenics

基　　金：甘肃省自然科学基金(18JR3RA012)

摘　　要：在含有混合气体的高真空环境中,全压力真空规的计量结果通常会随着被测气体成分的改变而产生较大的差异,因此,需要进行气体成分的检测及分压力的计量。质谱计作为气体成分检测及分压力计量的主要工具,为保证其定量检测的准确性,必须进行校准。从原理上对质谱计校准方法进行了总结,介绍了当前国内外计量机构使用的部分校准装置以及当前分压力计量的光学及量子相关方法的发展现状,提出了质谱计校准存在的问题和未来的发展方向。In a low-pressure environment,the measurement results of the total pressure vacuum gauge usually vary greatly with the change of the measured gas composition. In a high-vacuum environment containing a mixed gas,the total pressure gauge cannot accurately complete the pressure measurement mission. Therefore,the detection of gas components and the measurement of partial pressure are required. As the main tool for gas component detection and partial pressure measurement,mass spectrometers are widely used in various production and scientific research tasks. To ensure the accuracy of the mass spectrometer’s quantitative detection,the mass spectrometer needs to be calibrated. In this paper,the calibration method of ion mass spectrometer is summarized in principle,and some calibration devices used by domestic and international metrology institutions are introduced. Finally,we introduce the current development of optical and quantum correlation methods for partial pressure,proposes the problems of current mass spectrometer calibration,and proposes the future development direction of mass spectrometer calibration for these problems.

关 键 词：分压力 校准 质谱计 

分 类 号：TB77[一般工业技术—真空技术]